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Framework for uncertainty evaluation in optical surface topography measurement using a virtual instrument.

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Title: Framework for uncertainty evaluation in optical surface topography measurement using a virtual instrument.
Authors: Hooshmand, Helia1 (AUTHOR) Helia.Hooshmand@nottingham.ac.uk, Pappas, Athanasios1 (AUTHOR), Isa, Mohammed A1 (AUTHOR), Su, Rong2 (AUTHOR), Haitjema, Han3 (AUTHOR), Piano, Samanta1 (AUTHOR), Leach, Richard1 (AUTHOR)
Source: Measurement (02632241). Sep2025:Part D, Vol. 253, pN.PAG-N.PAG. 1p.
Subjects: Surface topography measurement, Optical measurements, Surface texture, Surface topography, Metrology
Abstract: • Challenges in uncertainty evaluation using metrological characteristics. • Using a virtual instrument for uncertainty evaluation in optical surface metrology. • Introducing a framework to quantify the uncertainty contribution of error sources. • Employing a tilted optical flat for continuous scanner non-linearity measurement. Uncertainty evaluation in the measurement of surfaces with complex topography using optical techniques remains a challenge due to the complex interaction between light and the surfaces. The ISO 25178 part 600 specification standard simplifies uncertainty evaluation by introducing a set of agreed metrological characteristics that can be propagated through a mathematical model. To complement this, we developed a virtual coherence scanning interferometer to model error sources and provide task-specific uncertainty evaluation. This paper presents a framework for evaluating measurement uncertainty of areal surface texture parameters, using both the metrological characteristics approach and the virtual instrument method. We demonstrate this framework by assessing the uncertainty of the Sq parameter, which represents the root-mean-square of surface heights, for sinusoidal and quasi-random surfaces. By comparing the combined standard uncertainty from both approaches, we quantify the contribution of topography fidelity, a key but difficult-to-evaluate characteristic. The proposed method offers a comprehensive understanding of uncertainty in optical surface measurement, leading to improved tolerancing in manufacturing. [ABSTRACT FROM AUTHOR]
Copyright of Measurement (02632241) is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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  Availability: 0
Header DbId: egs
DbLabel: Engineering Source
An: 185624461
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Framework for uncertainty evaluation in optical surface topography measurement using a virtual instrument.
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  Data: <searchLink fieldCode="AR" term="%22Hooshmand%2C+Helia%22">Hooshmand, Helia</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> Helia.Hooshmand@nottingham.ac.uk</i><br /><searchLink fieldCode="AR" term="%22Pappas%2C+Athanasios%22">Pappas, Athanasios</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Isa%2C+Mohammed+A%22">Isa, Mohammed A</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Su%2C+Rong%22">Su, Rong</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Haitjema%2C+Han%22">Haitjema, Han</searchLink><relatesTo>3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Piano%2C+Samanta%22">Piano, Samanta</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Leach%2C+Richard%22">Leach, Richard</searchLink><relatesTo>1</relatesTo> (AUTHOR)
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  Data: <searchLink fieldCode="JN" term="%22Measurement+%2802632241%29%22">Measurement (02632241)</searchLink>. Sep2025:Part D, Vol. 253, pN.PAG-N.PAG. 1p.
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  Data: <searchLink fieldCode="DE" term="%22Surface+topography+measurement%22">Surface topography measurement</searchLink><br /><searchLink fieldCode="DE" term="%22Optical+measurements%22">Optical measurements</searchLink><br /><searchLink fieldCode="DE" term="%22Surface+texture%22">Surface texture</searchLink><br /><searchLink fieldCode="DE" term="%22Surface+topography%22">Surface topography</searchLink><br /><searchLink fieldCode="DE" term="%22Metrology%22">Metrology</searchLink>
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  Data: • Challenges in uncertainty evaluation using metrological characteristics. • Using a virtual instrument for uncertainty evaluation in optical surface metrology. • Introducing a framework to quantify the uncertainty contribution of error sources. • Employing a tilted optical flat for continuous scanner non-linearity measurement. Uncertainty evaluation in the measurement of surfaces with complex topography using optical techniques remains a challenge due to the complex interaction between light and the surfaces. The ISO 25178 part 600 specification standard simplifies uncertainty evaluation by introducing a set of agreed metrological characteristics that can be propagated through a mathematical model. To complement this, we developed a virtual coherence scanning interferometer to model error sources and provide task-specific uncertainty evaluation. This paper presents a framework for evaluating measurement uncertainty of areal surface texture parameters, using both the metrological characteristics approach and the virtual instrument method. We demonstrate this framework by assessing the uncertainty of the Sq parameter, which represents the root-mean-square of surface heights, for sinusoidal and quasi-random surfaces. By comparing the combined standard uncertainty from both approaches, we quantify the contribution of topography fidelity, a key but difficult-to-evaluate characteristic. The proposed method offers a comprehensive understanding of uncertainty in optical surface measurement, leading to improved tolerancing in manufacturing. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
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  Data: <i>Copyright of Measurement (02632241) is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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        Value: 10.1016/j.measurement.2025.117604
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      – Code: eng
        Text: English
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        PageCount: 1
        StartPage: N.PAG
    Subjects:
      – SubjectFull: Surface topography measurement
        Type: general
      – SubjectFull: Optical measurements
        Type: general
      – SubjectFull: Surface texture
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      – SubjectFull: Surface topography
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      – SubjectFull: Metrology
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      – TitleFull: Framework for uncertainty evaluation in optical surface topography measurement using a virtual instrument.
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            – D: 15
              M: 09
              Text: Sep2025:Part D
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              Y: 2025
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