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Cathodoluminescence in a Scanning Electron Microscope Operated in Transmission Mode.

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Title: Cathodoluminescence in a Scanning Electron Microscope Operated in Transmission Mode.
Authors: Schulz, Tobias1 (AUTHOR) tobias.schulz@ikz-berlin.de, Lachowski, Artur1 (AUTHOR), Kernke, Robert1 (AUTHOR), Albrecht, Martin1 (AUTHOR)
Source: Journal of Electronic Materials. Jul2025, Vol. 54 Issue 7, p5058-5065. 8p.
Subjects: Transmission electron microscopes, Scanning transmission electron microscopy, Physical sciences, Signal-to-noise ratio, Electrons
Abstract: This study demonstrates the potential of correlative analysis cathodoluminescence (CL) carried out in a scanning electron microscope (SEM) operated in transmission mode in combination with a segmented detector. As demonstrated for the analysis of an (Al,Ga)N/AlN layer system, the use of 30 keV primary electrons permits the correlative recording of scanning transmission electron microscopy (STEM) bright field (BF), dark field (DF), high-angle annular dark field (HAADF), along with the CL signal. Despite the limitation to 30 keV, the transmitted electron signals provide an enhanced signal-to-noise ratio and improved chemical sensitivity as compared to any in-lens or chamber detector. Quantitative evaluation of the BF signal facilitates the estimation of sample thickness and identification of extended defects. The HAADF signal is significantly influenced by dynamical scattering effects, rendering material contrast highly thickness-dependent. Consequently, quantitative compositional analysis requires precise knowledge of the sample thickness, or alternatively, correlative analysis with spectrally resolved CL. [ABSTRACT FROM AUTHOR]
Copyright of Journal of Electronic Materials is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Data: This study demonstrates the potential of correlative analysis cathodoluminescence (CL) carried out in a scanning electron microscope (SEM) operated in transmission mode in combination with a segmented detector. As demonstrated for the analysis of an (Al,Ga)N/AlN layer system, the use of 30 keV primary electrons permits the correlative recording of scanning transmission electron microscopy (STEM) bright field (BF), dark field (DF), high-angle annular dark field (HAADF), along with the CL signal. Despite the limitation to 30 keV, the transmitted electron signals provide an enhanced signal-to-noise ratio and improved chemical sensitivity as compared to any in-lens or chamber detector. Quantitative evaluation of the BF signal facilitates the estimation of sample thickness and identification of extended defects. The HAADF signal is significantly influenced by dynamical scattering effects, rendering material contrast highly thickness-dependent. Consequently, quantitative compositional analysis requires precise knowledge of the sample thickness, or alternatively, correlative analysis with spectrally resolved CL. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
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  Data: <i>Copyright of Journal of Electronic Materials is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1007/s11664-025-11904-9
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      – Code: eng
        Text: English
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        PageCount: 8
        StartPage: 5058
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      – SubjectFull: Transmission electron microscopes
        Type: general
      – SubjectFull: Scanning transmission electron microscopy
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      – SubjectFull: Physical sciences
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      – SubjectFull: Signal-to-noise ratio
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      – SubjectFull: Electrons
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      – TitleFull: Cathodoluminescence in a Scanning Electron Microscope Operated in Transmission Mode.
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            – D: 01
              M: 07
              Text: Jul2025
              Type: published
              Y: 2025
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