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Digital, intelligent, and all-round optical manufacturing method-magnetorheological finishing (wheel type): a review.

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Title: Digital, intelligent, and all-round optical manufacturing method-magnetorheological finishing (wheel type): a review.
Authors: Wang, Bo1,2,3 (AUTHOR), Zhang, Wanli1,2,3 (AUTHOR), Wang, Zhanyang1,2,3 (AUTHOR), Song, Ci1,2,3 (AUTHOR) songci@nudt.edu.cn, Shi, Feng1,2,3 (AUTHOR), Tie, Guipeng1,2,3 (AUTHOR), Peng, Xing1,2,3 (AUTHOR), Qiao, Shuo1,2,3 (AUTHOR), Hao, Qun4,5 (AUTHOR)
Source: International Journal of Advanced Manufacturing Technology. Jun2025, Vol. 138 Issue 11, p5057-5096. 40p.
Subjects: Extreme ultraviolet lithography, Engineering equipment, Automation, Production engineering, Engineering models
Abstract: Nowadays, the aerospace, extreme ultraviolet lithography, large scientific devices, and other systems require optical components to be processed with full-band sub-nanometer precision, ultra-high surface quality, and near-zero sub-surface damage. To cope with such stringent requirements, magnetorheological finishing (MRF) (wheel type), a digital, intelligent, and comprehensive optical manufacturing method, has a wide range of applications and "bright" development prospects in the present and the future. To further promote the development of MRF and realize the goal of MRF into the next-generation optical manufacturing, it is necessary to review and summarize the MRF technology. This paper firstly introduces the origin and development history of MRF, then begins with the digital, intelligent, and all-around manufacturing characteristics of magnetorheological polishing. The following three aspects are introduced in detail: digital modeling methods of MRF (basic theory): tool influence function (TIF) modeling method, computer control linear/nonlinear figuring theory, dwell time solving model and algorithm; intelligent equipment and processes of MRF (technical core): multi-axis motion platform with high precision/stability/dynamic characteristics, modular electromagnetic/permanent magnet MRF tools, and intelligent auxiliary methods; comprehensive target applications of MRF (key processes): MRF process with sub-nanometer precision, ultra-high surface quality, near-zero non-destructive sub-surface, and mid-frequency error optimization control. Finally, the future key work of MRF is prospected. In addition, this paper has important reference value for researchers who want to have a comprehensive understanding of MRF. [ABSTRACT FROM AUTHOR]
Copyright of International Journal of Advanced Manufacturing Technology is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Data: Digital, intelligent, and all-round optical manufacturing method-magnetorheological finishing (wheel type): a review.
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  Data: <searchLink fieldCode="AR" term="%22Wang%2C+Bo%22">Wang, Bo</searchLink><relatesTo>1,2,3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Zhang%2C+Wanli%22">Zhang, Wanli</searchLink><relatesTo>1,2,3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Wang%2C+Zhanyang%22">Wang, Zhanyang</searchLink><relatesTo>1,2,3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Song%2C+Ci%22">Song, Ci</searchLink><relatesTo>1,2,3</relatesTo> (AUTHOR)<i> songci@nudt.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Shi%2C+Feng%22">Shi, Feng</searchLink><relatesTo>1,2,3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Tie%2C+Guipeng%22">Tie, Guipeng</searchLink><relatesTo>1,2,3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Peng%2C+Xing%22">Peng, Xing</searchLink><relatesTo>1,2,3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Qiao%2C+Shuo%22">Qiao, Shuo</searchLink><relatesTo>1,2,3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Hao%2C+Qun%22">Hao, Qun</searchLink><relatesTo>4,5</relatesTo> (AUTHOR)
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  Data: <searchLink fieldCode="JN" term="%22International+Journal+of+Advanced+Manufacturing+Technology%22">International Journal of Advanced Manufacturing Technology</searchLink>. Jun2025, Vol. 138 Issue 11, p5057-5096. 40p.
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  Data: <searchLink fieldCode="DE" term="%22Extreme+ultraviolet+lithography%22">Extreme ultraviolet lithography</searchLink><br /><searchLink fieldCode="DE" term="%22Engineering+equipment%22">Engineering equipment</searchLink><br /><searchLink fieldCode="DE" term="%22Automation%22">Automation</searchLink><br /><searchLink fieldCode="DE" term="%22Production+engineering%22">Production engineering</searchLink><br /><searchLink fieldCode="DE" term="%22Engineering+models%22">Engineering models</searchLink>
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  Label: Abstract
  Group: Ab
  Data: Nowadays, the aerospace, extreme ultraviolet lithography, large scientific devices, and other systems require optical components to be processed with full-band sub-nanometer precision, ultra-high surface quality, and near-zero sub-surface damage. To cope with such stringent requirements, magnetorheological finishing (MRF) (wheel type), a digital, intelligent, and comprehensive optical manufacturing method, has a wide range of applications and "bright" development prospects in the present and the future. To further promote the development of MRF and realize the goal of MRF into the next-generation optical manufacturing, it is necessary to review and summarize the MRF technology. This paper firstly introduces the origin and development history of MRF, then begins with the digital, intelligent, and all-around manufacturing characteristics of magnetorheological polishing. The following three aspects are introduced in detail: digital modeling methods of MRF (basic theory): tool influence function (TIF) modeling method, computer control linear/nonlinear figuring theory, dwell time solving model and algorithm; intelligent equipment and processes of MRF (technical core): multi-axis motion platform with high precision/stability/dynamic characteristics, modular electromagnetic/permanent magnet MRF tools, and intelligent auxiliary methods; comprehensive target applications of MRF (key processes): MRF process with sub-nanometer precision, ultra-high surface quality, near-zero non-destructive sub-surface, and mid-frequency error optimization control. Finally, the future key work of MRF is prospected. In addition, this paper has important reference value for researchers who want to have a comprehensive understanding of MRF. [ABSTRACT FROM AUTHOR]
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  Label:
  Group: Ab
  Data: <i>Copyright of International Journal of Advanced Manufacturing Technology is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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      – SubjectFull: Automation
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              Text: Jun2025
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