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Allocation of geometrical errors for developing precision measurement machine.

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Title: Allocation of geometrical errors for developing precision measurement machine.
Authors: Lai, Tao1,2 (AUTHOR), Liu, Junfeng1,2 (AUTHOR) ljf20090702122@163.com, Chen, Fulei1,2 (AUTHOR) ch_fl5711@163.com, Li, Zelong1,2 (AUTHOR), Guan, Chaoliang1,2 (AUTHOR), Li, Huang1,2 (AUTHOR), Xu, Chao1,2 (AUTHOR), Hu, Hao1,2 (AUTHOR), Dai, Yifan1,2 (AUTHOR), Chen, Shanyong1,2 (AUTHOR), Dai, Zhongxiang3 (AUTHOR)
Source: Journal of Intelligent Manufacturing. Aug2025, Vol. 36 Issue 6, p4105-4127. 23p.
Subjects: Production engineering, Magnetorheology, Geometric modeling, Profilometer, Interferometers
Abstract: A high-precision measurement machine tool faces the challenge of correlating the overall motion accuracy with the components form and positional accuracy. This study presents an innovative method for addressing this issue in ultra-precision measuring machines. A geometric error model based on multibody theory, and a weight model are established to predict measurement results and correlate overall motion accuracy with individual component accuracy. To validate the model, a target overall motion accuracy of 100 nm is set and the all the individual components accuracy is calculated by the geometric error weights derived from the proposed model. By fabricating a critical component, the linear guideway, to meet specific individual accuracies and incorporating it in an ultra-precise measurement machine, the study demonstrates achieving the individual accuracies with the magnetorheological polishing. Finally, the overall motion accuracy is validated by a cross test among the designed machine, DUI profilometer, and Zygo interferometer. By measuring a same optical surface, the measurement results show the surface PV differences better than 100 nm. The results demonstrate the validation of the correlation between overall motion accuracy and component accuracy established by the method described in this paper. In conclusion, this study offers an accurate design solution for determining overall motion and individual accuracies, enabling high accuracy in intelligent manufacturing equipment. [ABSTRACT FROM AUTHOR]
Copyright of Journal of Intelligent Manufacturing is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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An: 186645281
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PubTypeId: academicJournal
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  Data: Allocation of geometrical errors for developing precision measurement machine.
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  Data: <searchLink fieldCode="AR" term="%22Lai%2C+Tao%22">Lai, Tao</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Liu%2C+Junfeng%22">Liu, Junfeng</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<i> ljf20090702122@163.com</i><br /><searchLink fieldCode="AR" term="%22Chen%2C+Fulei%22">Chen, Fulei</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<i> ch_fl5711@163.com</i><br /><searchLink fieldCode="AR" term="%22Li%2C+Zelong%22">Li, Zelong</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Guan%2C+Chaoliang%22">Guan, Chaoliang</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Li%2C+Huang%22">Li, Huang</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Xu%2C+Chao%22">Xu, Chao</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Hu%2C+Hao%22">Hu, Hao</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Dai%2C+Yifan%22">Dai, Yifan</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Chen%2C+Shanyong%22">Chen, Shanyong</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Dai%2C+Zhongxiang%22">Dai, Zhongxiang</searchLink><relatesTo>3</relatesTo> (AUTHOR)
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Intelligent+Manufacturing%22">Journal of Intelligent Manufacturing</searchLink>. Aug2025, Vol. 36 Issue 6, p4105-4127. 23p.
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  Data: <searchLink fieldCode="DE" term="%22Production+engineering%22">Production engineering</searchLink><br /><searchLink fieldCode="DE" term="%22Magnetorheology%22">Magnetorheology</searchLink><br /><searchLink fieldCode="DE" term="%22Geometric+modeling%22">Geometric modeling</searchLink><br /><searchLink fieldCode="DE" term="%22Profilometer%22">Profilometer</searchLink><br /><searchLink fieldCode="DE" term="%22Interferometers%22">Interferometers</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: A high-precision measurement machine tool faces the challenge of correlating the overall motion accuracy with the components form and positional accuracy. This study presents an innovative method for addressing this issue in ultra-precision measuring machines. A geometric error model based on multibody theory, and a weight model are established to predict measurement results and correlate overall motion accuracy with individual component accuracy. To validate the model, a target overall motion accuracy of 100 nm is set and the all the individual components accuracy is calculated by the geometric error weights derived from the proposed model. By fabricating a critical component, the linear guideway, to meet specific individual accuracies and incorporating it in an ultra-precise measurement machine, the study demonstrates achieving the individual accuracies with the magnetorheological polishing. Finally, the overall motion accuracy is validated by a cross test among the designed machine, DUI profilometer, and Zygo interferometer. By measuring a same optical surface, the measurement results show the surface PV differences better than 100 nm. The results demonstrate the validation of the correlation between overall motion accuracy and component accuracy established by the method described in this paper. In conclusion, this study offers an accurate design solution for determining overall motion and individual accuracies, enabling high accuracy in intelligent manufacturing equipment. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Journal of Intelligent Manufacturing is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1007/s10845-024-02440-0
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      – Code: eng
        Text: English
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        PageCount: 23
        StartPage: 4105
    Subjects:
      – SubjectFull: Production engineering
        Type: general
      – SubjectFull: Magnetorheology
        Type: general
      – SubjectFull: Geometric modeling
        Type: general
      – SubjectFull: Profilometer
        Type: general
      – SubjectFull: Interferometers
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      – TitleFull: Allocation of geometrical errors for developing precision measurement machine.
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              M: 08
              Text: Aug2025
              Type: published
              Y: 2025
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