A Class of RF-MEMS Switches with Low Pull-In Voltage.

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Title: A Class of RF-MEMS Switches with Low Pull-In Voltage.
Authors: Tagliapietra, Girolamo1 (AUTHOR) gtagliapietra@fbk.eu, Iannacci, Jacopo1 (AUTHOR) iannacci@fbk.eu
Source: Journal of Circuits, Systems & Computers. 11/15/2025, Vol. 34 Issue 16, p1-12. 12p.
Subjects: Microelectromechanical systems, ANSYS (Computer system), Electromagnetic interactions, Mechanical movements, Electromechanical impedance analysis, Design techniques, Electronic equipment
Abstract: This paper presents a class comprising three series of Ohmic switches, elucidating their design principles, simulation outcomes and the findings derived from measuring the initial batch of manufactured samples. The design of the membranes employs meandered beams to achieve a small actuation voltage. Initial electro-mechanical simulations, conducted within the Ansys Workbench environment, projected actuation voltages ranging from 5 to 8 Volts, whereas the measured values were marginally higher. The electromagnetic behavior of these devices demonstrated a generally qualitative concordance with simulations performed in the Ansys HFSS environment, exhibiting satisfactory performance in terms of return loss (< − 2 0. 2 2   dB) and isolation (< − 1 4. 8 6   dB) across the 5–30 GHz frequency spectrum. [ABSTRACT FROM AUTHOR]
Copyright of Journal of Circuits, Systems & Computers is the property of World Scientific Publishing Company and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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An: 187194336
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PubTypeId: academicJournal
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  Data: A Class of RF-MEMS Switches with Low Pull-In Voltage.
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– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: This paper presents a class comprising three series of Ohmic switches, elucidating their design principles, simulation outcomes and the findings derived from measuring the initial batch of manufactured samples. The design of the membranes employs meandered beams to achieve a small actuation voltage. Initial electro-mechanical simulations, conducted within the Ansys Workbench environment, projected actuation voltages ranging from 5 to 8 Volts, whereas the measured values were marginally higher. The electromagnetic behavior of these devices demonstrated a generally qualitative concordance with simulations performed in the Ansys HFSS environment, exhibiting satisfactory performance in terms of return loss (&lt; − 2 0. 2 2 &#160; dB) and isolation (&lt; − 1 4. 8 6 &#160; dB) across the 5–30 GHz frequency spectrum. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
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  Data: &lt;i&gt;Copyright of Journal of Circuits, Systems &amp; Computers is the property of World Scientific Publishing Company and its content may not be copied or emailed to multiple sites without the copyright holder&#39;s express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.&lt;/i&gt; (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1142/S0218126624410044
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      – Code: eng
        Text: English
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        PageCount: 12
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    Subjects:
      – SubjectFull: Microelectromechanical systems
        Type: general
      – SubjectFull: ANSYS (Computer system)
        Type: general
      – SubjectFull: Electromagnetic interactions
        Type: general
      – SubjectFull: Mechanical movements
        Type: general
      – SubjectFull: Electromechanical impedance analysis
        Type: general
      – SubjectFull: Design techniques
        Type: general
      – SubjectFull: Electronic equipment
        Type: general
    Titles:
      – TitleFull: A Class of RF-MEMS Switches with Low Pull-In Voltage.
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          Name:
            NameFull: Tagliapietra, Girolamo
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          Name:
            NameFull: Iannacci, Jacopo
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            – D: 15
              M: 11
              Text: 11/15/2025
              Type: published
              Y: 2025
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            – TitleFull: Journal of Circuits, Systems & Computers
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