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Design and verification of a single-end 3-DOF piezoelectric micromanipulator for micro-object posture manipulations.

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Title: Design and verification of a single-end 3-DOF piezoelectric micromanipulator for micro-object posture manipulations.
Authors: Zhang, Shijing1 (AUTHOR), Zeng, Jingze1 (AUTHOR), Quan, Qiquan1 (AUTHOR), Li, Jing1 (AUTHOR), Guan, Jinghan1 (AUTHOR), Liu, Yingxiang1 (AUTHOR) liuyingxiang868@hit.edu.cn
Source: International Journal of Smart & Nano Materials. Sep2025, Vol. 16 Issue 3, p549-567. 19p.
Subjects: Multi-degree of freedom, Object manipulation, Mechanical vibration research, Micromachining, Displacement (Mechanics), Piezoelectricity, Micrurgy
Abstract: Piezoelectric micromanipulator has become one of the most representative micromanipulators by means of some obvious merits, including fast response, high resolution, good electromagnetic compatibility, etc. Most existing piezoelectric micromanipulators mainly use piezoelectric stacks or bonded actuators as driving units, facing great challenges in achieving multi-DOF and large-range operations. It requires multiple driving units, as well as complex excitation signals and structural configurations. To address these problems, a single-end 3-DOF piezoelectric micromanipulator driven by ring-shaped multi-zone piezoelectric ceramics is designed in this work. The lateral and longitudinal motion characteristics of the micromanipulator are calculated and estimated via simulations, and a series of experiments are carried out to evaluate its vibration, displacement and force characteristics. The designed micromanipulator achieves 3-DOF orthogonal motions in X-axis, Y-axis and Z-axis with maximum manipulation displacement of 88.42 μm, optimal displacement resolution of 31.19 nm, maximum operating force of 4.85 mN and the optimal force resolution of 18.97 μN. Finally, the micromanipulation experiments fully verify its application potential in the micro-object posture manipulation. It also holds promising application prospects in robot-assisted micromanipulation, micromachining, and micro assembly. [ABSTRACT FROM AUTHOR]
Copyright of International Journal of Smart & Nano Materials is the property of Taylor & Francis Ltd and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Label: Title
  Group: Ti
  Data: Design and verification of a single-end 3-DOF piezoelectric micromanipulator for micro-object posture manipulations.
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  Data: <searchLink fieldCode="AR" term="%22Zhang%2C+Shijing%22">Zhang, Shijing</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Zeng%2C+Jingze%22">Zeng, Jingze</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Quan%2C+Qiquan%22">Quan, Qiquan</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Li%2C+Jing%22">Li, Jing</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Guan%2C+Jinghan%22">Guan, Jinghan</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Liu%2C+Yingxiang%22">Liu, Yingxiang</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> liuyingxiang868@hit.edu.cn</i>
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  Data: <searchLink fieldCode="JN" term="%22International+Journal+of+Smart+%26+Nano+Materials%22">International Journal of Smart & Nano Materials</searchLink>. Sep2025, Vol. 16 Issue 3, p549-567. 19p.
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  Data: <searchLink fieldCode="DE" term="%22Multi-degree+of+freedom%22">Multi-degree of freedom</searchLink><br /><searchLink fieldCode="DE" term="%22Object+manipulation%22">Object manipulation</searchLink><br /><searchLink fieldCode="DE" term="%22Mechanical+vibration+research%22">Mechanical vibration research</searchLink><br /><searchLink fieldCode="DE" term="%22Micromachining%22">Micromachining</searchLink><br /><searchLink fieldCode="DE" term="%22Displacement+%28Mechanics%29%22">Displacement (Mechanics)</searchLink><br /><searchLink fieldCode="DE" term="%22Piezoelectricity%22">Piezoelectricity</searchLink><br /><searchLink fieldCode="DE" term="%22Micrurgy%22">Micrurgy</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Piezoelectric micromanipulator has become one of the most representative micromanipulators by means of some obvious merits, including fast response, high resolution, good electromagnetic compatibility, etc. Most existing piezoelectric micromanipulators mainly use piezoelectric stacks or bonded actuators as driving units, facing great challenges in achieving multi-DOF and large-range operations. It requires multiple driving units, as well as complex excitation signals and structural configurations. To address these problems, a single-end 3-DOF piezoelectric micromanipulator driven by ring-shaped multi-zone piezoelectric ceramics is designed in this work. The lateral and longitudinal motion characteristics of the micromanipulator are calculated and estimated via simulations, and a series of experiments are carried out to evaluate its vibration, displacement and force characteristics. The designed micromanipulator achieves 3-DOF orthogonal motions in X-axis, Y-axis and Z-axis with maximum manipulation displacement of 88.42 μm, optimal displacement resolution of 31.19 nm, maximum operating force of 4.85 mN and the optimal force resolution of 18.97 μN. Finally, the micromanipulation experiments fully verify its application potential in the micro-object posture manipulation. It also holds promising application prospects in robot-assisted micromanipulation, micromachining, and micro assembly. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of International Journal of Smart & Nano Materials is the property of Taylor & Francis Ltd and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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        Value: 10.1080/19475411.2025.2517552
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      – Code: eng
        Text: English
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        PageCount: 19
        StartPage: 549
    Subjects:
      – SubjectFull: Multi-degree of freedom
        Type: general
      – SubjectFull: Object manipulation
        Type: general
      – SubjectFull: Mechanical vibration research
        Type: general
      – SubjectFull: Micromachining
        Type: general
      – SubjectFull: Displacement (Mechanics)
        Type: general
      – SubjectFull: Piezoelectricity
        Type: general
      – SubjectFull: Micrurgy
        Type: general
    Titles:
      – TitleFull: Design and verification of a single-end 3-DOF piezoelectric micromanipulator for micro-object posture manipulations.
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      – PersonEntity:
          Name:
            NameFull: Zhang, Shijing
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          Name:
            NameFull: Zeng, Jingze
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            NameFull: Quan, Qiquan
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            NameFull: Li, Jing
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            NameFull: Guan, Jinghan
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            – D: 01
              M: 09
              Text: Sep2025
              Type: published
              Y: 2025
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            – TitleFull: International Journal of Smart & Nano Materials
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