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Single Mask and Large Amplification Electrothermal Microgripper.

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Title: Single Mask and Large Amplification Electrothermal Microgripper.
Authors: Hong-Pham, Phuc1 (AUTHOR), Hoang, Kien Trung2 (AUTHOR), Nguyen, Dzung Tien3 (AUTHOR) dungnguyentien@tnut.edu.vn, Tusset, Angelo Marcelo (AUTHOR) tusset@utfpr.edu.br
Source: Shock & Vibration. 11/7/2025, Vol. 2025, p1-9. 9p.
Subjects: Displacement (Mechanics), Microactuators, Thin film deposition, Silicon-on-insulator technology, Photolithography, Electric power consumption
Abstract: The paper presents a new electrothermal microgripper with a large amplification ratio and a single photo mask. This microgripper is designed with the 40‐μm‐stroke, which is 3.33 times larger than displacement of the driving V‐shaped actuator. It is successfully fabricated by using SOI‐MEMS technology, with an additional platinum sputtering step to reduce equivalent resistance of V‐beams system as well as the power consumption. The experimental displacement has been tested and compared with nonlinear calculations and simulation results. At a driving voltage of 10 V, the microgripper achieved a displacement of 36 μm, compared to the calculated and simulated values of 45.3 and 40.9 µm, respectively. [ABSTRACT FROM AUTHOR]
Copyright of Shock & Vibration is the property of Wiley-Blackwell and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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An: 189189216
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  Data: Single Mask and Large Amplification Electrothermal Microgripper.
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  Data: <searchLink fieldCode="AR" term="%22Hong-Pham%2C+Phuc%22">Hong-Pham, Phuc</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Hoang%2C+Kien+Trung%22">Hoang, Kien Trung</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Nguyen%2C+Dzung+Tien%22">Nguyen, Dzung Tien</searchLink><relatesTo>3</relatesTo> (AUTHOR)<i> dungnguyentien@tnut.edu.vn</i><br /><searchLink fieldCode="AR" term="%22Tusset%2C+Angelo+Marcelo%22">Tusset, Angelo Marcelo</searchLink> (AUTHOR)<i> tusset@utfpr.edu.br</i>
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  Data: <searchLink fieldCode="JN" term="%22Shock+%26+Vibration%22">Shock & Vibration</searchLink>. 11/7/2025, Vol. 2025, p1-9. 9p.
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  Data: <searchLink fieldCode="DE" term="%22Displacement+%28Mechanics%29%22">Displacement (Mechanics)</searchLink><br /><searchLink fieldCode="DE" term="%22Microactuators%22">Microactuators</searchLink><br /><searchLink fieldCode="DE" term="%22Thin+film+deposition%22">Thin film deposition</searchLink><br /><searchLink fieldCode="DE" term="%22Silicon-on-insulator+technology%22">Silicon-on-insulator technology</searchLink><br /><searchLink fieldCode="DE" term="%22Photolithography%22">Photolithography</searchLink><br /><searchLink fieldCode="DE" term="%22Electric+power+consumption%22">Electric power consumption</searchLink>
– Name: Abstract
  Label: Abstract
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  Data: The paper presents a new electrothermal microgripper with a large amplification ratio and a single photo mask. This microgripper is designed with the 40‐μm‐stroke, which is 3.33 times larger than displacement of the driving V‐shaped actuator. It is successfully fabricated by using SOI‐MEMS technology, with an additional platinum sputtering step to reduce equivalent resistance of V‐beams system as well as the power consumption. The experimental displacement has been tested and compared with nonlinear calculations and simulation results. At a driving voltage of 10 V, the microgripper achieved a displacement of 36 μm, compared to the calculated and simulated values of 45.3 and 40.9 µm, respectively. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Shock & Vibration is the property of Wiley-Blackwell and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1155/vib/7861072
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 9
        StartPage: 1
    Subjects:
      – SubjectFull: Displacement (Mechanics)
        Type: general
      – SubjectFull: Microactuators
        Type: general
      – SubjectFull: Thin film deposition
        Type: general
      – SubjectFull: Silicon-on-insulator technology
        Type: general
      – SubjectFull: Photolithography
        Type: general
      – SubjectFull: Electric power consumption
        Type: general
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      – TitleFull: Single Mask and Large Amplification Electrothermal Microgripper.
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            NameFull: Hong-Pham, Phuc
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            NameFull: Hoang, Kien Trung
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            NameFull: Nguyen, Dzung Tien
      – PersonEntity:
          Name:
            NameFull: Tusset, Angelo Marcelo
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          Dates:
            – D: 07
              M: 11
              Text: 11/7/2025
              Type: published
              Y: 2025
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              Value: 2025
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            – TitleFull: Shock & Vibration
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