MPCVD diamond thin films as heat spreaders for back end of the line (BEOL) silicon chip fabrication. - Tzeng, Yonhua; Lin, Fu-Cheng; Guu, Stephen Yang-En; Chien, Yu-Sen; Jhang, Alen; Tsai, Jian-Wei; Chang, Hsiaokang; Huang, Hsin-Yen; Lee, Shao-Kuan; Lee, Cheng-Chin; Yang, Kuang-Wei; Hsieh, Wen-Pin (Diamond & Related Materials, 2025)