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Dual-Functional Microwire ITO Heater and Sensor Fabricated by Laser Micromachining.

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Title: Dual-Functional Microwire ITO Heater and Sensor Fabricated by Laser Micromachining.
Authors: Yu, Min-Chieh1,2, Huang, Pin-Chung1,2, Kao, Wei-Chen1, Cheng, Ji-Yen1,3 jycheng@gate.sinica.edu.tw
Source: Journal of Laser Micro / Nanoengineering. Nov2025, Vol. 20 Issue 3, p283-291. 9p.
Subjects: Resistance heating, Indium tin oxide, Detectors, Surface analysis, Fibers, Laser machining
Abstract: This study demonstrates a dual-functional microwire fabricated from Indium Tin Oxide (ITO) film. A nanosecond ultraviolet (UV) laser scriber system is used for the ITO surface scribing. We fabricated two transparent microwire and demonstrated that the single wires achieved both heating and sensing functionalities. For heating purpose, the microwires were applied with a bias voltage for achieving Joule heating effect. The electrical current through the microwire was simultaneously measured for obtaining the resistance of the microwire by Ohm’s law. The temperature was thus obtained by the temperature coefficient resistance (TCR) curve of the microwire. We also tested the effect of oxygen plasma treatment on the ITO microwires’TCR. It was found that the TCR slope increased by nearly 20%, indicating enhanced temperature sensitivity. In addition, we analyzed surface morphology and heat-affected zones (HAZ) of the laser-ablated region. The surface characterization showed that longer pulse duration and increased energy density resulted in a significant increase in rim height but not notable surface roughness changes. This dual-functional ITO micrometer heater/sensor enabled a temperature gradient of ~5 °C/μm at 100 °C, which demonstrated its excellent potential for precise thermal control and sensing applications. [ABSTRACT FROM AUTHOR]
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Database: Engineering Source
Description
Abstract:This study demonstrates a dual-functional microwire fabricated from Indium Tin Oxide (ITO) film. A nanosecond ultraviolet (UV) laser scriber system is used for the ITO surface scribing. We fabricated two transparent microwire and demonstrated that the single wires achieved both heating and sensing functionalities. For heating purpose, the microwires were applied with a bias voltage for achieving Joule heating effect. The electrical current through the microwire was simultaneously measured for obtaining the resistance of the microwire by Ohm’s law. The temperature was thus obtained by the temperature coefficient resistance (TCR) curve of the microwire. We also tested the effect of oxygen plasma treatment on the ITO microwires’TCR. It was found that the TCR slope increased by nearly 20%, indicating enhanced temperature sensitivity. In addition, we analyzed surface morphology and heat-affected zones (HAZ) of the laser-ablated region. The surface characterization showed that longer pulse duration and increased energy density resulted in a significant increase in rim height but not notable surface roughness changes. This dual-functional ITO micrometer heater/sensor enabled a temperature gradient of ~5 °C/μm at 100 °C, which demonstrated its excellent potential for precise thermal control and sensing applications. [ABSTRACT FROM AUTHOR]
ISSN:18800688
DOI:10.2961/jlmn.2025.03.2015