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Dual-Functional Microwire ITO Heater and Sensor Fabricated by Laser Micromachining.

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Title: Dual-Functional Microwire ITO Heater and Sensor Fabricated by Laser Micromachining.
Authors: Yu, Min-Chieh1,2, Huang, Pin-Chung1,2, Kao, Wei-Chen1, Cheng, Ji-Yen1,3 jycheng@gate.sinica.edu.tw
Source: Journal of Laser Micro / Nanoengineering. Nov2025, Vol. 20 Issue 3, p283-291. 9p.
Subjects: Resistance heating, Indium tin oxide, Detectors, Surface analysis, Fibers, Laser machining
Abstract: This study demonstrates a dual-functional microwire fabricated from Indium Tin Oxide (ITO) film. A nanosecond ultraviolet (UV) laser scriber system is used for the ITO surface scribing. We fabricated two transparent microwire and demonstrated that the single wires achieved both heating and sensing functionalities. For heating purpose, the microwires were applied with a bias voltage for achieving Joule heating effect. The electrical current through the microwire was simultaneously measured for obtaining the resistance of the microwire by Ohm’s law. The temperature was thus obtained by the temperature coefficient resistance (TCR) curve of the microwire. We also tested the effect of oxygen plasma treatment on the ITO microwires’TCR. It was found that the TCR slope increased by nearly 20%, indicating enhanced temperature sensitivity. In addition, we analyzed surface morphology and heat-affected zones (HAZ) of the laser-ablated region. The surface characterization showed that longer pulse duration and increased energy density resulted in a significant increase in rim height but not notable surface roughness changes. This dual-functional ITO micrometer heater/sensor enabled a temperature gradient of ~5 °C/μm at 100 °C, which demonstrated its excellent potential for precise thermal control and sensing applications. [ABSTRACT FROM AUTHOR]
Copyright of Journal of Laser Micro / Nanoengineering is the property of Japan Laser Processing Society and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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DbLabel: Engineering Source
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  Data: Dual-Functional Microwire ITO Heater and Sensor Fabricated by Laser Micromachining.
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  Data: <searchLink fieldCode="AR" term="%22Yu%2C+Min-Chieh%22">Yu, Min-Chieh</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AR" term="%22Huang%2C+Pin-Chung%22">Huang, Pin-Chung</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AR" term="%22Kao%2C+Wei-Chen%22">Kao, Wei-Chen</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Cheng%2C+Ji-Yen%22">Cheng, Ji-Yen</searchLink><relatesTo>1,3</relatesTo><i> jycheng@gate.sinica.edu.tw</i>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Laser+Micro+%2F+Nanoengineering%22">Journal of Laser Micro / Nanoengineering</searchLink>. Nov2025, Vol. 20 Issue 3, p283-291. 9p.
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  Data: <searchLink fieldCode="DE" term="%22Resistance+heating%22">Resistance heating</searchLink><br /><searchLink fieldCode="DE" term="%22Indium+tin+oxide%22">Indium tin oxide</searchLink><br /><searchLink fieldCode="DE" term="%22Detectors%22">Detectors</searchLink><br /><searchLink fieldCode="DE" term="%22Surface+analysis%22">Surface analysis</searchLink><br /><searchLink fieldCode="DE" term="%22Fibers%22">Fibers</searchLink><br /><searchLink fieldCode="DE" term="%22Laser+machining%22">Laser machining</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: This study demonstrates a dual-functional microwire fabricated from Indium Tin Oxide (ITO) film. A nanosecond ultraviolet (UV) laser scriber system is used for the ITO surface scribing. We fabricated two transparent microwire and demonstrated that the single wires achieved both heating and sensing functionalities. For heating purpose, the microwires were applied with a bias voltage for achieving Joule heating effect. The electrical current through the microwire was simultaneously measured for obtaining the resistance of the microwire by Ohm’s law. The temperature was thus obtained by the temperature coefficient resistance (TCR) curve of the microwire. We also tested the effect of oxygen plasma treatment on the ITO microwires’TCR. It was found that the TCR slope increased by nearly 20%, indicating enhanced temperature sensitivity. In addition, we analyzed surface morphology and heat-affected zones (HAZ) of the laser-ablated region. The surface characterization showed that longer pulse duration and increased energy density resulted in a significant increase in rim height but not notable surface roughness changes. This dual-functional ITO micrometer heater/sensor enabled a temperature gradient of ~5 °C/μm at 100 °C, which demonstrated its excellent potential for precise thermal control and sensing applications. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Journal of Laser Micro / Nanoengineering is the property of Japan Laser Processing Society and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=egs&AN=189923620
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.2961/jlmn.2025.03.2015
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 9
        StartPage: 283
    Subjects:
      – SubjectFull: Resistance heating
        Type: general
      – SubjectFull: Indium tin oxide
        Type: general
      – SubjectFull: Detectors
        Type: general
      – SubjectFull: Surface analysis
        Type: general
      – SubjectFull: Fibers
        Type: general
      – SubjectFull: Laser machining
        Type: general
    Titles:
      – TitleFull: Dual-Functional Microwire ITO Heater and Sensor Fabricated by Laser Micromachining.
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            NameFull: Yu, Min-Chieh
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            NameFull: Huang, Pin-Chung
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            NameFull: Kao, Wei-Chen
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            NameFull: Cheng, Ji-Yen
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            – D: 01
              M: 11
              Text: Nov2025
              Type: published
              Y: 2025
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            – TitleFull: Journal of Laser Micro / Nanoengineering
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