View in EDS

Influence of discharge characteristics on composition, stress, and properties of TiBx coatings by industrial HiPIMS at constant average power.

Saved in:
Bibliographic Details
Title: Influence of discharge characteristics on composition, stress, and properties of TiBx coatings by industrial HiPIMS at constant average power.
Authors: Chang, Chi-Lung1,2 (AUTHOR), Lin, Min-Yi1 (AUTHOR), Yang, Fu-Sen2,3 (AUTHOR), Tang, Jian-Fu1,4 (AUTHOR) jftang@nkust.edu.tw
Source: Applied Surface Science. Mar2026, Vol. 721, pN.PAG-N.PAG. 1p.
Subjects: Microstructure, Hardness, Industrial applications, Strains & stresses (Mechanics), Wear resistance, Pulse width modulation, Titanium diboride, Magnetron sputtering
Abstract: Constant-power industrial HiPIMS: duty-cycle control drives J pk , refines TiB 2 microstructure, and tunes the hardness–stress trade-off. [Display omitted] • Industrial long-pulse HiPIMS at constant average power isolates duty-cycle mapping on a large-area target. • Both peak and quasi-steady discharge metrics (J pk /J ss , V ss , P ss) are reported and linked to film responses. • Duty cycle refines TiB 2 microstructure (from columnar to denser/finer). • Properties co-evolve: hardness increases, wear rate decreases, compressive stress increases (tunable trade-off). • WLI 3D topography reveals ring cracks at low duty vs smooth DC edges. In this study, TiB 2 coatings were deposited using high-power impulse magnetron sputtering (HiPIMS) to investigate the effects of duty cycle on their microstructure and mechanical performance, and tribological behavior. While prior studies have explored general HiPIMS effects on TiB 2 , this work focuses on duty cycle modulation (3 %, 5 %, 10 %, 25 %, and 100 % (DC)) at constant target power (3.5 kW) and frequency (200 Hz), offering insights into its impact on peak target current density, elemental composition, and performance. A decrease in duty cycle led to a substantial increase in peak current density from 0.01 to 0.87 A/cm2. The B/Ti ratio increased from 2.4 to 2.7, hardness improved from 28.3 to 43.2 GPa, and compressive residual stress increased from −0.2 to −4.6 GPa. These enhancements improved wear resistance, with wear rates below 20 × 10−8 mm3/N‧m. We also report quasi-steady discharge metrics (J ss , P ss , V ss) alongside peak values and map adhesion/damage modes (HF, Lc2, WLI 3D), providing an industrial guide for long-pulse processes. Coating adhesion was examined using both normal and lateral scratch tests, showing strong correlation with deposition parameters. The results establish a transferable process map for industrial long-pulse HiPIMS of TiB 2. [ABSTRACT FROM AUTHOR]
Copyright of Applied Surface Science is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
Description
Abstract:Constant-power industrial HiPIMS: duty-cycle control drives J pk , refines TiB 2 microstructure, and tunes the hardness–stress trade-off. [Display omitted] • Industrial long-pulse HiPIMS at constant average power isolates duty-cycle mapping on a large-area target. • Both peak and quasi-steady discharge metrics (J pk /J ss , V ss , P ss) are reported and linked to film responses. • Duty cycle refines TiB 2 microstructure (from columnar to denser/finer). • Properties co-evolve: hardness increases, wear rate decreases, compressive stress increases (tunable trade-off). • WLI 3D topography reveals ring cracks at low duty vs smooth DC edges. In this study, TiB 2 coatings were deposited using high-power impulse magnetron sputtering (HiPIMS) to investigate the effects of duty cycle on their microstructure and mechanical performance, and tribological behavior. While prior studies have explored general HiPIMS effects on TiB 2 , this work focuses on duty cycle modulation (3 %, 5 %, 10 %, 25 %, and 100 % (DC)) at constant target power (3.5 kW) and frequency (200 Hz), offering insights into its impact on peak target current density, elemental composition, and performance. A decrease in duty cycle led to a substantial increase in peak current density from 0.01 to 0.87 A/cm2. The B/Ti ratio increased from 2.4 to 2.7, hardness improved from 28.3 to 43.2 GPa, and compressive residual stress increased from −0.2 to −4.6 GPa. These enhancements improved wear resistance, with wear rates below 20 × 10−8 mm3/N‧m. We also report quasi-steady discharge metrics (J ss , P ss , V ss) alongside peak values and map adhesion/damage modes (HF, Lc2, WLI 3D), providing an industrial guide for long-pulse processes. Coating adhesion was examined using both normal and lateral scratch tests, showing strong correlation with deposition parameters. The results establish a transferable process map for industrial long-pulse HiPIMS of TiB 2. [ABSTRACT FROM AUTHOR]
ISSN:01694332
DOI:10.1016/j.apsusc.2025.165461