APA (7th ed.) Citation

Uvarov, I. V., & Belozerov, I. A. (2025). A Miniature Electrostatic Actuator with Enhanced Contact Force for a Resistive MEMS Switch. Russian Microelectronics, 54(6), 609. https://doi.org/10.1134/S1063739725600864

Chicago Style (17th ed.) Citation

Uvarov, I. V., and I. A. Belozerov. "A Miniature Electrostatic Actuator with Enhanced Contact Force for a Resistive MEMS Switch." Russian Microelectronics 54, no. 6 (2025): 609. https://doi.org/10.1134/S1063739725600864.

MLA (9th ed.) Citation

Uvarov, I. V., and I. A. Belozerov. "A Miniature Electrostatic Actuator with Enhanced Contact Force for a Resistive MEMS Switch." Russian Microelectronics, vol. 54, no. 6, 2025, p. 609, https://doi.org/10.1134/S1063739725600864.