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A Miniature Electrostatic Actuator with Enhanced Contact Force for a Resistive MEMS Switch.

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Title: A Miniature Electrostatic Actuator with Enhanced Contact Force for a Resistive MEMS Switch.
Authors: Uvarov, I. V.1,2 (AUTHOR) i.v.uvarov@bk.ru, Belozerov, I. A.1 (AUTHOR)
Source: Russian Microelectronics. Dec2025, Vol. 54 Issue 6, p609-616. 8p.
Subjects: Electrostatic actuators, Microelectromechanical systems, Microactuators, Cantilevers, Reliability in engineering, Contact mechanics, Microwave devices, Actuators
Abstract: Micromechanical switches are of significant interest for microwave electronics; however, their implementation is hampered by low reliability. Micron-sized actuators generate only a small contact force, which prevents achieving low and stable contact resistance. The contact force is increased by using large and complex-shaped electrodes, but a compact and simple actuator is preferable. This article describes methods for increasing the contact force of an electrostatically actuated MEMS switch. They are demonstrated on a miniature actuator with a movable electrode in the form of a 50-µm-long cantilever. By selecting vertical dimensions, the force can be increased from 10 to 115 μN, exceeding the required threshold of 100 μN with a reserve. The release force also increases and ensures that the switch does not stick. Combining multiple actuators and removing intermediate contact bumps further increases the specific force by at least 50% compared to a single device. [ABSTRACT FROM AUTHOR]
Copyright of Russian Microelectronics is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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  Data: Micromechanical switches are of significant interest for microwave electronics; however, their implementation is hampered by low reliability. Micron-sized actuators generate only a small contact force, which prevents achieving low and stable contact resistance. The contact force is increased by using large and complex-shaped electrodes, but a compact and simple actuator is preferable. This article describes methods for increasing the contact force of an electrostatically actuated MEMS switch. They are demonstrated on a miniature actuator with a movable electrode in the form of a 50-µm-long cantilever. By selecting vertical dimensions, the force can be increased from 10 to 115 μN, exceeding the required threshold of 100 μN with a reserve. The release force also increases and ensures that the switch does not stick. Combining multiple actuators and removing intermediate contact bumps further increases the specific force by at least 50% compared to a single device. [ABSTRACT FROM AUTHOR]
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  Data: <i>Copyright of Russian Microelectronics is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1134/S1063739725600864
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      – Code: eng
        Text: English
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        PageCount: 8
        StartPage: 609
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      – SubjectFull: Electrostatic actuators
        Type: general
      – SubjectFull: Microelectromechanical systems
        Type: general
      – SubjectFull: Microactuators
        Type: general
      – SubjectFull: Cantilevers
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      – SubjectFull: Reliability in engineering
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      – SubjectFull: Contact mechanics
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      – SubjectFull: Microwave devices
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      – SubjectFull: Actuators
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              M: 12
              Text: Dec2025
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              Y: 2025
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