A Miniature Electrostatic Actuator with Enhanced Contact Force for a Resistive MEMS Switch.
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| Title: | A Miniature Electrostatic Actuator with Enhanced Contact Force for a Resistive MEMS Switch. |
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| Authors: | Uvarov, I. V.1,2 (AUTHOR) i.v.uvarov@bk.ru, Belozerov, I. A.1 (AUTHOR) |
| Source: | Russian Microelectronics. Dec2025, Vol. 54 Issue 6, p609-616. 8p. |
| Subjects: | Electrostatic actuators, Microelectromechanical systems, Microactuators, Cantilevers, Reliability in engineering, Contact mechanics, Microwave devices, Actuators |
| Abstract: | Micromechanical switches are of significant interest for microwave electronics; however, their implementation is hampered by low reliability. Micron-sized actuators generate only a small contact force, which prevents achieving low and stable contact resistance. The contact force is increased by using large and complex-shaped electrodes, but a compact and simple actuator is preferable. This article describes methods for increasing the contact force of an electrostatically actuated MEMS switch. They are demonstrated on a miniature actuator with a movable electrode in the form of a 50-µm-long cantilever. By selecting vertical dimensions, the force can be increased from 10 to 115 μN, exceeding the required threshold of 100 μN with a reserve. The release force also increases and ensures that the switch does not stick. Combining multiple actuators and removing intermediate contact bumps further increases the specific force by at least 50% compared to a single device. [ABSTRACT FROM AUTHOR] |
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| Database: | Engineering Source |
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