Development of Antireflective Interference Coatings in the Range of 3–5 µm for Optical Parametric Oscillators Based on ZnGeP2.

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Title: Development of Antireflective Interference Coatings in the Range of 3–5 µm for Optical Parametric Oscillators Based on ZnGeP2.
Authors: Yudin, N. N.1,2 (AUTHOR) rach3@yandex.ru, Zinovev, M. M.1,2 (AUTHOR), Podzyvalov, S. N.1,2 (AUTHOR), Slyunko, E. S.1,2 (AUTHOR), Kuznetsov, V. S.1,2 (AUTHOR), Lysenko, A. B.1,2 (AUTHOR), Kalsin, A. Yu.1,2 (AUTHOR), Kulesh, M. M.1 (AUTHOR), Vlasov, D. V.1 (AUTHOR)
Source: Optics & Spectroscopy. Jun2025, Vol. 133 Issue 1-6, p16-19. 4p.
Subjects: Antireflective coatings, Optical parametric oscillators, Silicon oxide, Semiconductor films, Optical properties, Titanium oxides, Multilayers, Sputter deposition
Abstract: The dispersions of the refractive index and absorption coefficient were determined for monolayers of titanium oxide and silicon oxide. The design of a multilayer antireflective optical coating for these materials in the spectral range of 0.4–8 μm has been developed. Modes for applying coating using ion-beam sputtering onto a semiconductor substrate have been selected. The optical characteristics of a four-layer interference coating with antireflection coating on a ZGP substrate were measured in the range of 2097 nm and 3.5–5 μm, with residual reflection R ≤ 0.2% and R ≤ 2.1%, respectively. Tests were carried out for adhesion and abrasion of the coating in accordance with GOST. [ABSTRACT FROM AUTHOR]
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Abstract:The dispersions of the refractive index and absorption coefficient were determined for monolayers of titanium oxide and silicon oxide. The design of a multilayer antireflective optical coating for these materials in the spectral range of 0.4–8 μm has been developed. Modes for applying coating using ion-beam sputtering onto a semiconductor substrate have been selected. The optical characteristics of a four-layer interference coating with antireflection coating on a ZGP substrate were measured in the range of 2097 nm and 3.5–5 μm, with residual reflection R ≤ 0.2% and R ≤ 2.1%, respectively. Tests were carried out for adhesion and abrasion of the coating in accordance with GOST. [ABSTRACT FROM AUTHOR]
ISSN:0030400X
DOI:10.1134/S0030400X25700043