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Damping in vertical comb-drive microactuators at different pressures.

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Title: Damping in vertical comb-drive microactuators at different pressures.
Authors: Sharma, Varun P.1,2 (AUTHOR), Ganguli, Tapas1,2 (AUTHOR), Rai, S. K.1,2 (AUTHOR), Shukla, Rahul1,2 (AUTHOR) rahulshukla@rrcat.gov.in
Source: Microsystem Technologies. Mar2026, Vol. 32 Issue 3, p1-10. 10p.
Subjects: Damping (Mechanics), Microactuators, Microelectromechanical systems, Finite element method, Knudsen flow
Abstract: Damping is a key factor affecting the dynamic performance of micro-electro-mechanical systems (MEMS) and the precise prediction of the damping behaviour is very crucial for optimizing the design and enhancing the performance parameters of MEMS based vertical comb-drive (VCD) micromirrors. The present study provides a brief discussion of various damping mechanisms in MEMS based devices especially for the VCD micromirrors. To understand the effect of damping in VCD micromirrors, Rayleigh damping and squeezed film damping (SFD), were first modelled using the finite element method (FEM). It was found that SFD is the most dominant damping mechanism to analyse the damping behaviour in VCD. Following the comparison, to comprehend the effect of SFD in VCD micromirror, FEM is used to model the SFD fluid dynamics within the narrow gap of 400 μm for various flow regimes characterized by Knudsen number (Kn). The optical deflection angle and SFD film pressure distribution are calculated for pressures varying from low vacuum (1 Pa) to atmospheric pressure (105 Pa). The optical deflection angles are enhanced by upto 2.3 times while operating the device at lower vacuum (1 Pa) in comparison to the atmospheric pressure (105 Pa) and significantly reduces the input power for driving the micromirror in low pressure environment. [ABSTRACT FROM AUTHOR]
Copyright of Microsystem Technologies is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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DbLabel: Engineering Source
An: 191451109
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PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Damping in vertical comb-drive microactuators at different pressures.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Sharma%2C+Varun+P%2E%22">Sharma, Varun P.</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Ganguli%2C+Tapas%22">Ganguli, Tapas</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Rai%2C+S%2E+K%2E%22">Rai, S. K.</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Shukla%2C+Rahul%22">Shukla, Rahul</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<i> rahulshukla@rrcat.gov.in</i>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Microsystem+Technologies%22">Microsystem Technologies</searchLink>. Mar2026, Vol. 32 Issue 3, p1-10. 10p.
– Name: Subject
  Label: Subjects
  Group: Su
  Data: <searchLink fieldCode="DE" term="%22Damping+%28Mechanics%29%22">Damping (Mechanics)</searchLink><br /><searchLink fieldCode="DE" term="%22Microactuators%22">Microactuators</searchLink><br /><searchLink fieldCode="DE" term="%22Microelectromechanical+systems%22">Microelectromechanical systems</searchLink><br /><searchLink fieldCode="DE" term="%22Finite+element+method%22">Finite element method</searchLink><br /><searchLink fieldCode="DE" term="%22Knudsen+flow%22">Knudsen flow</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Damping is a key factor affecting the dynamic performance of micro-electro-mechanical systems (MEMS) and the precise prediction of the damping behaviour is very crucial for optimizing the design and enhancing the performance parameters of MEMS based vertical comb-drive (VCD) micromirrors. The present study provides a brief discussion of various damping mechanisms in MEMS based devices especially for the VCD micromirrors. To understand the effect of damping in VCD micromirrors, Rayleigh damping and squeezed film damping (SFD), were first modelled using the finite element method (FEM). It was found that SFD is the most dominant damping mechanism to analyse the damping behaviour in VCD. Following the comparison, to comprehend the effect of SFD in VCD micromirror, FEM is used to model the SFD fluid dynamics within the narrow gap of 400 μm for various flow regimes characterized by Knudsen number (Kn). The optical deflection angle and SFD film pressure distribution are calculated for pressures varying from low vacuum (1 Pa) to atmospheric pressure (105 Pa). The optical deflection angles are enhanced by upto 2.3 times while operating the device at lower vacuum (1 Pa) in comparison to the atmospheric pressure (105 Pa) and significantly reduces the input power for driving the micromirror in low pressure environment. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Microsystem Technologies is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1007/s00542-025-05981-3
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 10
        StartPage: 1
    Subjects:
      – SubjectFull: Damping (Mechanics)
        Type: general
      – SubjectFull: Microactuators
        Type: general
      – SubjectFull: Microelectromechanical systems
        Type: general
      – SubjectFull: Finite element method
        Type: general
      – SubjectFull: Knudsen flow
        Type: general
    Titles:
      – TitleFull: Damping in vertical comb-drive microactuators at different pressures.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Sharma, Varun P.
      – PersonEntity:
          Name:
            NameFull: Ganguli, Tapas
      – PersonEntity:
          Name:
            NameFull: Rai, S. K.
      – PersonEntity:
          Name:
            NameFull: Shukla, Rahul
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 03
              Text: Mar2026
              Type: published
              Y: 2026
          Identifiers:
            – Type: issn-print
              Value: 09467076
          Numbering:
            – Type: volume
              Value: 32
            – Type: issue
              Value: 3
          Titles:
            – TitleFull: Microsystem Technologies
              Type: main
ResultId 1