Tailoring structural and optical properties of Si-doped HfO2 thin films via target composition and plasma environment. - Khomenkov, D. V.; Ponomaryov, S. S.; Portier, X.; Melnichuk, L. Yu.; Khomenkova, L. Yu.; Gourbilleau, F.; Melnichuk, O. V. (Semiconductor Physics, Quantum Electronics & Optoelectronics, 2025)