Micromechanical RF Switch with Metal-to-Metal Contact.
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| Title: | Micromechanical RF Switch with Metal-to-Metal Contact. |
|---|---|
| Authors: | Uvarov, I. V.1,2 (AUTHOR) i.v.uvarov@bk.ru, Belozerov, I. A.1,2 (AUTHOR), Morozov, M. O.1,2 (AUTHOR) |
| Source: | Russian Microelectronics. Dec2025, Vol. 54 Issue 8, p1108-1112. 5p. |
| Subjects: | Microactuators, Contact resistance (Materials science), Radar, Electric switchgear, Microwave materials, Military electronics, Electrostatic actuators |
| Abstract: | MEMS switches are promising for mobile radar systems and electromagnetic warfare, but their performance has not yet reached the required level. Miniature electrostatic actuators produce weak contact force, preventing low contact resistance. In turn, low opening force leads to contact stiction. This paper presents a MEMS switch based on a microactuator with increased contact and opening forces. The design methodology, contact resistance, and microwave characteristics of the switch are described. [ABSTRACT FROM AUTHOR] |
| Copyright of Russian Microelectronics is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: egs DbLabel: Engineering Source An: 192461547 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Micromechanical RF Switch with Metal-to-Metal Contact. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Uvarov%2C+I%2E+V%2E%22">Uvarov, I. V.</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<i> i.v.uvarov@bk.ru</i><br /><searchLink fieldCode="AR" term="%22Belozerov%2C+I%2E+A%2E%22">Belozerov, I. A.</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Morozov%2C+M%2E+O%2E%22">Morozov, M. O.</searchLink><relatesTo>1,2</relatesTo> (AUTHOR) – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Russian+Microelectronics%22">Russian Microelectronics</searchLink>. Dec2025, Vol. 54 Issue 8, p1108-1112. 5p. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Microactuators%22">Microactuators</searchLink><br /><searchLink fieldCode="DE" term="%22Contact+resistance+%28Materials+science%29%22">Contact resistance (Materials science)</searchLink><br /><searchLink fieldCode="DE" term="%22Radar%22">Radar</searchLink><br /><searchLink fieldCode="DE" term="%22Electric+switchgear%22">Electric switchgear</searchLink><br /><searchLink fieldCode="DE" term="%22Microwave+materials%22">Microwave materials</searchLink><br /><searchLink fieldCode="DE" term="%22Military+electronics%22">Military electronics</searchLink><br /><searchLink fieldCode="DE" term="%22Electrostatic+actuators%22">Electrostatic actuators</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: MEMS switches are promising for mobile radar systems and electromagnetic warfare, but their performance has not yet reached the required level. Miniature electrostatic actuators produce weak contact force, preventing low contact resistance. In turn, low opening force leads to contact stiction. This paper presents a MEMS switch based on a microactuator with increased contact and opening forces. The design methodology, contact resistance, and microwave characteristics of the switch are described. [ABSTRACT FROM AUTHOR] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of Russian Microelectronics is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
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| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1134/S1063739725601444 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 5 StartPage: 1108 Subjects: – SubjectFull: Microactuators Type: general – SubjectFull: Contact resistance (Materials science) Type: general – SubjectFull: Radar Type: general – SubjectFull: Electric switchgear Type: general – SubjectFull: Microwave materials Type: general – SubjectFull: Military electronics Type: general – SubjectFull: Electrostatic actuators Type: general Titles: – TitleFull: Micromechanical RF Switch with Metal-to-Metal Contact. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Uvarov, I. V. – PersonEntity: Name: NameFull: Belozerov, I. A. – PersonEntity: Name: NameFull: Morozov, M. O. IsPartOfRelationships: – BibEntity: Dates: – D: 20 M: 12 Text: Dec2025 Type: published Y: 2025 Identifiers: – Type: issn-print Value: 10637397 Numbering: – Type: volume Value: 54 – Type: issue Value: 8 Titles: – TitleFull: Russian Microelectronics Type: main |
| ResultId | 1 |
