Berini, B., Burcea, R., Vallet, M., Fouchet, A., Aureau, D., Frégnaux, M., . . . Dumont, Y. (2026). Effect of various buffer layers for the large-scale atomic layer deposition integration of archetypical SrTiO3 thin film on silicon substrate. Applied Surface Science, 736, N.PAG. https://doi.org/10.1016/j.apsusc.2026.166810
Chicago Style (17th ed.) CitationBerini, Bruno, et al. "Effect of Various Buffer Layers for the Large-scale Atomic Layer Deposition Integration of Archetypical SrTiO3 Thin Film on Silicon Substrate." Applied Surface Science 736 (2026): N.PAG. https://doi.org/10.1016/j.apsusc.2026.166810.
MLA (9th ed.) CitationBerini, Bruno, et al. "Effect of Various Buffer Layers for the Large-scale Atomic Layer Deposition Integration of Archetypical SrTiO3 Thin Film on Silicon Substrate." Applied Surface Science, vol. 736, 2026, p. N.PAG, https://doi.org/10.1016/j.apsusc.2026.166810.