Effect of various buffer layers for the large-scale atomic layer deposition integration of archetypical SrTiO3 thin film on silicon substrate. - Berini, Bruno; Burcea, Razvan; Vallet, Maxime; Fouchet, Arnaud; Aureau, Damien; Frégnaux, Mathieu; Carretero, Cécile; Hurand, Simon; Demange, Valérie; Dumont, Yves (Applied Surface Science, 2026)