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Recent Advances in FIB-SEM for Microstructural Characterization of Metallic Materials.

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Title: Recent Advances in FIB-SEM for Microstructural Characterization of Metallic Materials.
Authors: Qiao, Yi1 (AUTHOR) qiaoyi@ustb.edu.cn, Zhang, Yong1 (AUTHOR) drzhangy@ustb.edu.cn
Source: Materials (1996-1944). May2026, Vol. 19 Issue 9, p1818. 13p.
Subjects: Focused ion beams, Scanning electron microscopy, Electron backscattering, Metals, Microstructure, Atom-probe tomography, Scientific method, Transmission electron microscopy
Abstract: Since its introduction, focused ion beam (FIB) technology has expanded from micro/nanofabrication in the semiconductor industry to the field of multimodal characterization of metallic material microstructures. This article systematically reviews the latest research advances in FIB-SEM technology in the field of metallic materials science. The fundamental principles and system functions of FIB-SEM are introduced, with an emphasis on its key applications in two-dimensional and three-dimensional morphological characterization, as well as specimen preparation for transmission electron microscopy (TEM) and atom probe tomography (APT). The combined strategies of FIB-SEM with electron backscatter diffraction (EBSD), time-of-flight secondary ion mass spectrometry (TOF-SIMS), and other characterization techniques are also discussed. Current developments indicate that FIB-SEM technology is advancing toward multi-ion-source synergy and multimodal integration. In the future, combined with artificial intelligence and big data analysis, it is expected to enable high-throughput, correlative measurements of multidimensional properties at the micro scale, providing important technical support for "materials genome" research in metallic materials. [ABSTRACT FROM AUTHOR]
Copyright of Materials (1996-1944) is the property of MDPI and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Data: Recent Advances in FIB-SEM for Microstructural Characterization of Metallic Materials.
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  Data: <searchLink fieldCode="AR" term="%22Qiao%2C+Yi%22">Qiao, Yi</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> qiaoyi@ustb.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Zhang%2C+Yong%22">Zhang, Yong</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> drzhangy@ustb.edu.cn</i>
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  Data: <searchLink fieldCode="JN" term="%22Materials+%281996-1944%29%22">Materials (1996-1944)</searchLink>. May2026, Vol. 19 Issue 9, p1818. 13p.
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  Data: <searchLink fieldCode="DE" term="%22Focused+ion+beams%22">Focused ion beams</searchLink><br /><searchLink fieldCode="DE" term="%22Scanning+electron+microscopy%22">Scanning electron microscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Electron+backscattering%22">Electron backscattering</searchLink><br /><searchLink fieldCode="DE" term="%22Metals%22">Metals</searchLink><br /><searchLink fieldCode="DE" term="%22Microstructure%22">Microstructure</searchLink><br /><searchLink fieldCode="DE" term="%22Atom-probe+tomography%22">Atom-probe tomography</searchLink><br /><searchLink fieldCode="DE" term="%22Scientific+method%22">Scientific method</searchLink><br /><searchLink fieldCode="DE" term="%22Transmission+electron+microscopy%22">Transmission electron microscopy</searchLink>
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  Data: Since its introduction, focused ion beam (FIB) technology has expanded from micro/nanofabrication in the semiconductor industry to the field of multimodal characterization of metallic material microstructures. This article systematically reviews the latest research advances in FIB-SEM technology in the field of metallic materials science. The fundamental principles and system functions of FIB-SEM are introduced, with an emphasis on its key applications in two-dimensional and three-dimensional morphological characterization, as well as specimen preparation for transmission electron microscopy (TEM) and atom probe tomography (APT). The combined strategies of FIB-SEM with electron backscatter diffraction (EBSD), time-of-flight secondary ion mass spectrometry (TOF-SIMS), and other characterization techniques are also discussed. Current developments indicate that FIB-SEM technology is advancing toward multi-ion-source synergy and multimodal integration. In the future, combined with artificial intelligence and big data analysis, it is expected to enable high-throughput, correlative measurements of multidimensional properties at the micro scale, providing important technical support for "materials genome" research in metallic materials. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Materials (1996-1944) is the property of MDPI and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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      – Type: doi
        Value: 10.3390/ma19091818
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 13
        StartPage: 1818
    Subjects:
      – SubjectFull: Focused ion beams
        Type: general
      – SubjectFull: Scanning electron microscopy
        Type: general
      – SubjectFull: Electron backscattering
        Type: general
      – SubjectFull: Metals
        Type: general
      – SubjectFull: Microstructure
        Type: general
      – SubjectFull: Atom-probe tomography
        Type: general
      – SubjectFull: Scientific method
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      – SubjectFull: Transmission electron microscopy
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      – TitleFull: Recent Advances in FIB-SEM for Microstructural Characterization of Metallic Materials.
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            NameFull: Qiao, Yi
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            NameFull: Zhang, Yong
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          Dates:
            – D: 01
              M: 05
              Text: May2026
              Type: published
              Y: 2026
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              Value: 19
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              Value: 9
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            – TitleFull: Materials (1996-1944)
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