Recent Advances in FIB-SEM for Microstructural Characterization of Metallic Materials.
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| Title: | Recent Advances in FIB-SEM for Microstructural Characterization of Metallic Materials. |
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| Authors: | Qiao, Yi1 (AUTHOR) qiaoyi@ustb.edu.cn, Zhang, Yong1 (AUTHOR) drzhangy@ustb.edu.cn |
| Source: | Materials (1996-1944). May2026, Vol. 19 Issue 9, p1818. 13p. |
| Subjects: | Focused ion beams, Scanning electron microscopy, Electron backscattering, Metals, Microstructure, Atom-probe tomography, Scientific method, Transmission electron microscopy |
| Abstract: | Since its introduction, focused ion beam (FIB) technology has expanded from micro/nanofabrication in the semiconductor industry to the field of multimodal characterization of metallic material microstructures. This article systematically reviews the latest research advances in FIB-SEM technology in the field of metallic materials science. The fundamental principles and system functions of FIB-SEM are introduced, with an emphasis on its key applications in two-dimensional and three-dimensional morphological characterization, as well as specimen preparation for transmission electron microscopy (TEM) and atom probe tomography (APT). The combined strategies of FIB-SEM with electron backscatter diffraction (EBSD), time-of-flight secondary ion mass spectrometry (TOF-SIMS), and other characterization techniques are also discussed. Current developments indicate that FIB-SEM technology is advancing toward multi-ion-source synergy and multimodal integration. In the future, combined with artificial intelligence and big data analysis, it is expected to enable high-throughput, correlative measurements of multidimensional properties at the micro scale, providing important technical support for "materials genome" research in metallic materials. [ABSTRACT FROM AUTHOR] |
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| Database: | Engineering Source |
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