Development of an atomic layer etching process for diamond substrates. - Régnier, Marine; Kasprzak, Jacek; Dydniański, Amadeusz; Rouchouze, Elliott; Traoré, Aboulaye; Gheeraert, Etienne; Bonvalot, Marceline (Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, 2026)