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Influences of sputtered crater geometry on glow discharge spectrometry depth profile.

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Title: Influences of sputtered crater geometry on glow discharge spectrometry depth profile.
Authors: Liu, Gong-Wen1 (AUTHOR), Tan, Zhi-Rou1 (AUTHOR), Guo, Rong-Rong2 (AUTHOR), Huang, Wei-Nan1 (AUTHOR), Li, Yu3 (AUTHOR), Lian, Song-You1 (AUTHOR) sylian1@stu.edu.cn, Wang, Jiang-Yong1,4 (AUTHOR) 15017214200@163.com
Source: Microchemical Journal. Jul2026, Vol. 226, pN.PAG-N.PAG. 1p.
Subjects: Glow discharges, Depth profiling
Abstract: In this paper, the mixing-roughness-information-CRAter-simulation (MRI-CRAS) model for the quantification of glow discharge spectrometry (GDS) depth profile is firstly revisited by introducing a visualized crater shape. Based on the MRI-CRAS model, the influences of sputtered crater on GDS depth profile are evaluated quantitatively. The gradual decrease of the signal plateau, the changes in the up/down slope, peak shift, and the 'sudden·inflection points' upon GDS depth profiling are well explained through the evolution of the corresponding crater shape. Then, a guideline for quantifying measured GDS depth profile is proposed without requiring prior optimization of working conditions. Finally, as an example, the depth profile of Si/Al multilayer measured by radio frequency glow discharge optical emission spectroscopy (RF-GDOES) is quantitatively evaluated. The computational program developed in this work has been made openly available on GitHub to facilitate reproducibility and further applications [Display omitted] • The impact of sputtered crater geometry on depth profile is quantitatively evaluated. • Crater shape causes peak shifts and slope changes in depth profiles. • "Sudden inflection point" is explained by crater evolution across layer interface. • A visual mechanism clarifies how crater shape distorts the measured depth profile. • A guideline is proposed to quantify depth profile without optimizing work conditions. [ABSTRACT FROM AUTHOR]
Copyright of Microchemical Journal is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 194335513
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Influences of sputtered crater geometry on glow discharge spectrometry depth profile.
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  Label: Authors
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  Data: <searchLink fieldCode="AR" term="%22Liu%2C+Gong-Wen%22">Liu, Gong-Wen</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Tan%2C+Zhi-Rou%22">Tan, Zhi-Rou</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Guo%2C+Rong-Rong%22">Guo, Rong-Rong</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Huang%2C+Wei-Nan%22">Huang, Wei-Nan</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Li%2C+Yu%22">Li, Yu</searchLink><relatesTo>3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Lian%2C+Song-You%22">Lian, Song-You</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> sylian1@stu.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Wang%2C+Jiang-Yong%22">Wang, Jiang-Yong</searchLink><relatesTo>1,4</relatesTo> (AUTHOR)<i> 15017214200@163.com</i>
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  Data: <searchLink fieldCode="JN" term="%22Microchemical+Journal%22">Microchemical Journal</searchLink>. Jul2026, Vol. 226, pN.PAG-N.PAG. 1p.
– Name: Subject
  Label: Subjects
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  Data: <searchLink fieldCode="DE" term="%22Glow+discharges%22">Glow discharges</searchLink><br /><searchLink fieldCode="DE" term="%22Depth+profiling%22">Depth profiling</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: In this paper, the mixing-roughness-information-CRAter-simulation (MRI-CRAS) model for the quantification of glow discharge spectrometry (GDS) depth profile is firstly revisited by introducing a visualized crater shape. Based on the MRI-CRAS model, the influences of sputtered crater on GDS depth profile are evaluated quantitatively. The gradual decrease of the signal plateau, the changes in the up/down slope, peak shift, and the 'sudden·inflection points' upon GDS depth profiling are well explained through the evolution of the corresponding crater shape. Then, a guideline for quantifying measured GDS depth profile is proposed without requiring prior optimization of working conditions. Finally, as an example, the depth profile of Si/Al multilayer measured by radio frequency glow discharge optical emission spectroscopy (RF-GDOES) is quantitatively evaluated. The computational program developed in this work has been made openly available on GitHub to facilitate reproducibility and further applications [Display omitted] • The impact of sputtered crater geometry on depth profile is quantitatively evaluated. • Crater shape causes peak shifts and slope changes in depth profiles. • "Sudden inflection point" is explained by crater evolution across layer interface. • A visual mechanism clarifies how crater shape distorts the measured depth profile. • A guideline is proposed to quantify depth profile without optimizing work conditions. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Microchemical Journal is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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      – Type: doi
        Value: 10.1016/j.microc.2026.118471
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      – Code: eng
        Text: English
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      – SubjectFull: Depth profiling
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      – TitleFull: Influences of sputtered crater geometry on glow discharge spectrometry depth profile.
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              Text: Jul2026
              Type: published
              Y: 2026
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