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Integrated optical emission spectroscopy and imaging diagnostics of atmospheric-pressure argon microwave-induced plasma.

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Title: Integrated optical emission spectroscopy and imaging diagnostics of atmospheric-pressure argon microwave-induced plasma.
Authors: Zhang, Yubo1,2,3 (AUTHOR), Liu, Yongsheng4,5 (AUTHOR) yshliu@hotmail.com, Lin, Jie4 (AUTHOR), Jiang, Xiaoming6 (AUTHOR), Liu, Wengui4 (AUTHOR), Liu, Zhenyi4 (AUTHOR), Zeng, Wen6 (AUTHOR), Zhang, Meng6 (AUTHOR), Tang, Qingsong6 (AUTHOR)
Source: JAAS (Journal of Analytical Atomic Spectrometry). Jun2026, Vol. 41 Issue 6, p2170-2180. 11p.
Subjects: Microwave plasmas, Plasma diagnostics, Emission spectroscopy, Atmospheric pressure plasmas, Argon plasmas, Plasma spectroscopy, Ionization (Atomic physics)
Abstract: Evaluating the ionization capability of microwave-induced plasma (MIP) ion sources remains challenging due to the lack of rapid, straightforward diagnostics. A rapid analysis platform integrating optical emission spectroscopy (OES) diagnostics with CCD-based plasma imaging was established in this study. An atmospheric-pressure argon MIP was characterized under varying microwave power (50–250 W) and argon flow rates (200–1000 SCCM). The results showed that Texc ranged from approximately 4500 to 6340 K, Trot from 758 to 1234 K, and Ne from 3.21 × 1014 to 5.55 × 1014 cm−3 across the tested conditions, in agreement with previously reported OES values for similar plasmas. Notably, the thermal and ionization characteristics of the plasma can be effectively regulated through optimization of the input power and gas flow rate. By analyzing the concomitant changes in plasma morphology, we further illustrate how discharge power and gas flow influence the stability and ionization behavior of the MIP. Finally, based on the calculated Texc and Ne, the Saha framework was used to semi-quantitatively estimate the apparent ionization tendency of selected elements and compounds. The results indicate that the ion source exhibits a high ionization tendency for species with first ionization energies below 6 eV, whereas species with first ionization energies above 10 eV are difficult to ionize. Overall, the proposed integrated spectroscopic and imaging diagnostic platform provides a practical, rapid strategy for evaluating and improving MIP ion source performance. It also offers insights into further optimization of the ion source to enhance analytical capabilities. [ABSTRACT FROM AUTHOR]
Copyright of JAAS (Journal of Analytical Atomic Spectrometry) is the property of Royal Society of Chemistry and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 194455535
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Integrated optical emission spectroscopy and imaging diagnostics of atmospheric-pressure argon microwave-induced plasma.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Zhang%2C+Yubo%22">Zhang, Yubo</searchLink><relatesTo>1,2,3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Liu%2C+Yongsheng%22">Liu, Yongsheng</searchLink><relatesTo>4,5</relatesTo> (AUTHOR)<i> yshliu@hotmail.com</i><br /><searchLink fieldCode="AR" term="%22Lin%2C+Jie%22">Lin, Jie</searchLink><relatesTo>4</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Jiang%2C+Xiaoming%22">Jiang, Xiaoming</searchLink><relatesTo>6</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Liu%2C+Wengui%22">Liu, Wengui</searchLink><relatesTo>4</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Liu%2C+Zhenyi%22">Liu, Zhenyi</searchLink><relatesTo>4</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Zeng%2C+Wen%22">Zeng, Wen</searchLink><relatesTo>6</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Zhang%2C+Meng%22">Zhang, Meng</searchLink><relatesTo>6</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Tang%2C+Qingsong%22">Tang, Qingsong</searchLink><relatesTo>6</relatesTo> (AUTHOR)
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22JAAS+%28Journal+of+Analytical+Atomic+Spectrometry%29%22">JAAS (Journal of Analytical Atomic Spectrometry)</searchLink>. Jun2026, Vol. 41 Issue 6, p2170-2180. 11p.
– Name: Subject
  Label: Subjects
  Group: Su
  Data: <searchLink fieldCode="DE" term="%22Microwave+plasmas%22">Microwave plasmas</searchLink><br /><searchLink fieldCode="DE" term="%22Plasma+diagnostics%22">Plasma diagnostics</searchLink><br /><searchLink fieldCode="DE" term="%22Emission+spectroscopy%22">Emission spectroscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Atmospheric+pressure+plasmas%22">Atmospheric pressure plasmas</searchLink><br /><searchLink fieldCode="DE" term="%22Argon+plasmas%22">Argon plasmas</searchLink><br /><searchLink fieldCode="DE" term="%22Plasma+spectroscopy%22">Plasma spectroscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Ionization+%28Atomic+physics%29%22">Ionization (Atomic physics)</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Evaluating the ionization capability of microwave-induced plasma (MIP) ion sources remains challenging due to the lack of rapid, straightforward diagnostics. A rapid analysis platform integrating optical emission spectroscopy (OES) diagnostics with CCD-based plasma imaging was established in this study. An atmospheric-pressure argon MIP was characterized under varying microwave power (50–250 W) and argon flow rates (200–1000 SCCM). The results showed that Texc ranged from approximately 4500 to 6340 K, Trot from 758 to 1234 K, and Ne from 3.21 × 1014 to 5.55 × 1014 cm−3 across the tested conditions, in agreement with previously reported OES values for similar plasmas. Notably, the thermal and ionization characteristics of the plasma can be effectively regulated through optimization of the input power and gas flow rate. By analyzing the concomitant changes in plasma morphology, we further illustrate how discharge power and gas flow influence the stability and ionization behavior of the MIP. Finally, based on the calculated Texc and Ne, the Saha framework was used to semi-quantitatively estimate the apparent ionization tendency of selected elements and compounds. The results indicate that the ion source exhibits a high ionization tendency for species with first ionization energies below 6 eV, whereas species with first ionization energies above 10 eV are difficult to ionize. Overall, the proposed integrated spectroscopic and imaging diagnostic platform provides a practical, rapid strategy for evaluating and improving MIP ion source performance. It also offers insights into further optimization of the ion source to enhance analytical capabilities. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of JAAS (Journal of Analytical Atomic Spectrometry) is the property of Royal Society of Chemistry and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1039/d6ja00115g
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 11
        StartPage: 2170
    Subjects:
      – SubjectFull: Microwave plasmas
        Type: general
      – SubjectFull: Plasma diagnostics
        Type: general
      – SubjectFull: Emission spectroscopy
        Type: general
      – SubjectFull: Atmospheric pressure plasmas
        Type: general
      – SubjectFull: Argon plasmas
        Type: general
      – SubjectFull: Plasma spectroscopy
        Type: general
      – SubjectFull: Ionization (Atomic physics)
        Type: general
    Titles:
      – TitleFull: Integrated optical emission spectroscopy and imaging diagnostics of atmospheric-pressure argon microwave-induced plasma.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Zhang, Yubo
      – PersonEntity:
          Name:
            NameFull: Liu, Yongsheng
      – PersonEntity:
          Name:
            NameFull: Lin, Jie
      – PersonEntity:
          Name:
            NameFull: Jiang, Xiaoming
      – PersonEntity:
          Name:
            NameFull: Liu, Wengui
      – PersonEntity:
          Name:
            NameFull: Liu, Zhenyi
      – PersonEntity:
          Name:
            NameFull: Zeng, Wen
      – PersonEntity:
          Name:
            NameFull: Zhang, Meng
      – PersonEntity:
          Name:
            NameFull: Tang, Qingsong
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 06
              Text: Jun2026
              Type: published
              Y: 2026
          Identifiers:
            – Type: issn-print
              Value: 02679477
          Numbering:
            – Type: volume
              Value: 41
            – Type: issue
              Value: 6
          Titles:
            – TitleFull: JAAS (Journal of Analytical Atomic Spectrometry)
              Type: main
ResultId 1