Optimisation of EDS quantitative f‐ratio method via ZAF correction.
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| Title: | Optimisation of EDS quantitative f‐ratio method via ZAF correction. |
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| Authors: | Chen, Jiayi1,2 (AUTHOR), Sun, Yue2 (AUTHOR), Tian, Liujia2 (AUTHOR), Huang, Yiling2 (AUTHOR), Song, Xuemei2 (AUTHOR), Peng, Fan2 (AUTHOR), Zheng, Wei2 (AUTHOR), Zeng, Yi1,2 (AUTHOR) zengyi@mail.sic.ac.cn |
| Source: | Journal of Microscopy. Jul2026, Vol. 303 Issue 1, p79-87. 9p. |
| Subjects: | Energy dispersive X-ray spectroscopy, Matrix effect, Field emission electron microscopes, Absorption coefficients, Quantitative research, Statistical accuracy |
| Abstract: | This study investigates the f‐ratio quantitative method applicable to Cold Field Emission Scanning Electron Microscope/Energy Dispersive X‐Ray Spectroscopy (CFE‐SEM/EDS) systems. To address the issue of cumbersome calculations arising from the reliance on real‐time simulation in traditional f‐ratio methods, this study proposes an efficient strategy of 'preset curve + ZAF correction'. This method employs pre‐constructed 'f‐ratio vs. concentration' models for individual elements derived from standard samples to substitute the traditional real‐time simulation of the unknown sample, and introduces ZAF factors to effectively compensate for matrix effects, thereby achieving quantitative analysis of unknown samples with matrix differences. An iterative approach was implemented to resolve the challenge of determining the absorption parameter (χ$\chi $), which arises due to the unknown concentration of the unknown sample. F‐ratio models were established based on the P–In, As–Ga, S–Zn, Se–Cd, and S–Fe systems. Quantitative f‐ratio analysis was subsequently performed on the binary system As–In and Se–Zn, as well as the ternary system S–As–Fe. The results demonstrate that the ZAF correction f‐ratio method achieves satisfactory precision. [ABSTRACT FROM AUTHOR] |
| Copyright of Journal of Microscopy is the property of Wiley-Blackwell and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: egs DbLabel: Engineering Source An: 194722979 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Optimisation of EDS quantitative f‐ratio method via ZAF correction. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Chen%2C+Jiayi%22">Chen, Jiayi</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Sun%2C+Yue%22">Sun, Yue</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Tian%2C+Liujia%22">Tian, Liujia</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Huang%2C+Yiling%22">Huang, Yiling</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Song%2C+Xuemei%22">Song, Xuemei</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Peng%2C+Fan%22">Peng, Fan</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Zheng%2C+Wei%22">Zheng, Wei</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Zeng%2C+Yi%22">Zeng, Yi</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<i> zengyi@mail.sic.ac.cn</i> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Journal+of+Microscopy%22">Journal of Microscopy</searchLink>. Jul2026, Vol. 303 Issue 1, p79-87. 9p. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Energy+dispersive+X-ray+spectroscopy%22">Energy dispersive X-ray spectroscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Matrix+effect%22">Matrix effect</searchLink><br /><searchLink fieldCode="DE" term="%22Field+emission+electron+microscopes%22">Field emission electron microscopes</searchLink><br /><searchLink fieldCode="DE" term="%22Absorption+coefficients%22">Absorption coefficients</searchLink><br /><searchLink fieldCode="DE" term="%22Quantitative+research%22">Quantitative research</searchLink><br /><searchLink fieldCode="DE" term="%22Statistical+accuracy%22">Statistical accuracy</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: This study investigates the f‐ratio quantitative method applicable to Cold Field Emission Scanning Electron Microscope/Energy Dispersive X‐Ray Spectroscopy (CFE‐SEM/EDS) systems. To address the issue of cumbersome calculations arising from the reliance on real‐time simulation in traditional f‐ratio methods, this study proposes an efficient strategy of 'preset curve + ZAF correction'. This method employs pre‐constructed 'f‐ratio vs. concentration' models for individual elements derived from standard samples to substitute the traditional real‐time simulation of the unknown sample, and introduces ZAF factors to effectively compensate for matrix effects, thereby achieving quantitative analysis of unknown samples with matrix differences. An iterative approach was implemented to resolve the challenge of determining the absorption parameter (χ$\chi $), which arises due to the unknown concentration of the unknown sample. F‐ratio models were established based on the P–In, As–Ga, S–Zn, Se–Cd, and S–Fe systems. Quantitative f‐ratio analysis was subsequently performed on the binary system As–In and Se–Zn, as well as the ternary system S–As–Fe. The results demonstrate that the ZAF correction f‐ratio method achieves satisfactory precision. [ABSTRACT FROM AUTHOR] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of Journal of Microscopy is the property of Wiley-Blackwell and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
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| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1111/jmi.70095 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 9 StartPage: 79 Subjects: – SubjectFull: Energy dispersive X-ray spectroscopy Type: general – SubjectFull: Matrix effect Type: general – SubjectFull: Field emission electron microscopes Type: general – SubjectFull: Absorption coefficients Type: general – SubjectFull: Quantitative research Type: general – SubjectFull: Statistical accuracy Type: general Titles: – TitleFull: Optimisation of EDS quantitative f‐ratio method via ZAF correction. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Chen, Jiayi – PersonEntity: Name: NameFull: Sun, Yue – PersonEntity: Name: NameFull: Tian, Liujia – PersonEntity: Name: NameFull: Huang, Yiling – PersonEntity: Name: NameFull: Song, Xuemei – PersonEntity: Name: NameFull: Peng, Fan – PersonEntity: Name: NameFull: Zheng, Wei – PersonEntity: Name: NameFull: Zeng, Yi IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 07 Text: Jul2026 Type: published Y: 2026 Identifiers: – Type: issn-print Value: 00222720 Numbering: – Type: volume Value: 303 – Type: issue Value: 1 Titles: – TitleFull: Journal of Microscopy Type: main |
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