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High-accuracy interferometric calibration system for 1-D displacement transducers.

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Title: High-accuracy interferometric calibration system for 1-D displacement transducers.
Authors: Mattila, Aleksi1 (AUTHOR) aleksi.mattila@vtt.fi, Lassila, Antti1 (AUTHOR)
Source: Measurement Science & Technology. 2026, Vol. 37 Issue 27, p1-9. 9p.
Subjects: Laser interferometers, Displacement (Mechanics), Tactile sensors, Interferometry, Measurement uncertainty (Statistics)
Abstract: Accurate calibration of tactile linear transducers is critical for ensuring traceability and reliability in precision measurement applications, particularly in fields such as advanced manufacturing, metrology, and scientific instrumentation. To meet the growing demand for faster and more accurate calibration, a novel purpose-built interferometric measurement instrument has been developed and implemented. The system features a high-precision 200 mm vertical linear stage and a heterodyne laser interferometer to provide repeatable and accurate measurements, with methods to minimize cosine error and Abbe offset. All components are integrated into a PC-controlled system that automates the measurement process. The setup includes real-time compensation for environmental influences, like air pressure, temperature, and humidity. Overscan routines and unidirectional motion during inward and outward measurements improve repeatability, while results are averaged over multiple runs to reduce uncertainty. This instrument enables traceable, high-resolution calibration in a controlled laboratory environment, supporting the increasing need for dependable dimensional metrology in high-precision applications. For calibration of high-accuracy, gravity-actuated 1-D displacement transducers with measurement ranges in the millimetre to centimetre scale, state-of-the-art expanded uncertainty of U = Q [12.6 nm; 1.9 × 10−7 l] is achieved. [ABSTRACT FROM AUTHOR]
Copyright of Measurement Science & Technology is the property of IOP Publishing and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 194991991
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: High-accuracy interferometric calibration system for 1-D displacement transducers.
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  Data: <searchLink fieldCode="AR" term="%22Mattila%2C+Aleksi%22">Mattila, Aleksi</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> aleksi.mattila@vtt.fi</i><br /><searchLink fieldCode="AR" term="%22Lassila%2C+Antti%22">Lassila, Antti</searchLink><relatesTo>1</relatesTo> (AUTHOR)
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  Data: <searchLink fieldCode="JN" term="%22Measurement+Science+%26+Technology%22">Measurement Science & Technology</searchLink>. 2026, Vol. 37 Issue 27, p1-9. 9p.
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  Data: <searchLink fieldCode="DE" term="%22Laser+interferometers%22">Laser interferometers</searchLink><br /><searchLink fieldCode="DE" term="%22Displacement+%28Mechanics%29%22">Displacement (Mechanics)</searchLink><br /><searchLink fieldCode="DE" term="%22Tactile+sensors%22">Tactile sensors</searchLink><br /><searchLink fieldCode="DE" term="%22Interferometry%22">Interferometry</searchLink><br /><searchLink fieldCode="DE" term="%22Measurement+uncertainty+%28Statistics%29%22">Measurement uncertainty (Statistics)</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Accurate calibration of tactile linear transducers is critical for ensuring traceability and reliability in precision measurement applications, particularly in fields such as advanced manufacturing, metrology, and scientific instrumentation. To meet the growing demand for faster and more accurate calibration, a novel purpose-built interferometric measurement instrument has been developed and implemented. The system features a high-precision 200 mm vertical linear stage and a heterodyne laser interferometer to provide repeatable and accurate measurements, with methods to minimize cosine error and Abbe offset. All components are integrated into a PC-controlled system that automates the measurement process. The setup includes real-time compensation for environmental influences, like air pressure, temperature, and humidity. Overscan routines and unidirectional motion during inward and outward measurements improve repeatability, while results are averaged over multiple runs to reduce uncertainty. This instrument enables traceable, high-resolution calibration in a controlled laboratory environment, supporting the increasing need for dependable dimensional metrology in high-precision applications. For calibration of high-accuracy, gravity-actuated 1-D displacement transducers with measurement ranges in the millimetre to centimetre scale, state-of-the-art expanded uncertainty of U = Q [12.6 nm; 1.9 × 10−7 l] is achieved. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Measurement Science & Technology is the property of IOP Publishing and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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      – Type: doi
        Value: 10.1088/1361-6501/ae7b70
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 9
        StartPage: 1
    Subjects:
      – SubjectFull: Laser interferometers
        Type: general
      – SubjectFull: Displacement (Mechanics)
        Type: general
      – SubjectFull: Tactile sensors
        Type: general
      – SubjectFull: Interferometry
        Type: general
      – SubjectFull: Measurement uncertainty (Statistics)
        Type: general
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      – TitleFull: High-accuracy interferometric calibration system for 1-D displacement transducers.
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            NameFull: Mattila, Aleksi
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            – D: 03
              M: 07
              Text: 2026
              Type: published
              Y: 2026
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              Value: 37
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              Value: 27
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            – TitleFull: Measurement Science & Technology
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