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Silicone polymer chemical vapor sensors fabricated by direct polymer patterning on substrate technique (DPPOST)

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Title: Silicone polymer chemical vapor sensors fabricated by direct polymer patterning on substrate technique (DPPOST)
Authors: Huang, Adam pohao@seas.ucla.edu, Wong, Victor Tak Sing1, Ho, Chih-Ming1
Source: Sensors & Actuators B: Chemical. Jul2006, Vol. 116 Issue 1/2, p2-10. 9p.
Subjects: Polymers, Silicon, Microelectromechanical systems, Detectors
Abstract: Abstract: Soft polymeric materials have proven to provide a host of new capabilities for micro-electro-mechanical systems (MEMS). However, the direct patterning of soft polymeric materials on substrates is not as developed as those found in photolithographic technologies for MEMS. This paper demonstrates the patterning of fully aligned soft polymeric materials, such as the room temperature vulcanizing (RTV) silicone, on glass or silicon substrates using the direct polymer patterning on substrate technique (DPPOST). The patterned polymer line width of ∼10μm has been achieved using this technique. By utilizing this newly developed fabrication technology, single and array elements of silicone–carbon black polymeric chemical vapor sensor has been fabricated and tested for the intended application in electronic nose systems. The sensors have been shown to be sensitive to common solvents such as acetone, methanol, ethanol and 2-propanol. Simple noise measurement experiments also show the insensitivity of the sensor noise to the chemical vapor concentrations. [Copyright &y& Elsevier]
Copyright of Sensors & Actuators B: Chemical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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DbLabel: Engineering Source
An: 20959913
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
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  Label: Title
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  Data: Silicone polymer chemical vapor sensors fabricated by direct polymer patterning on substrate technique (DPPOST)
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  Data: <searchLink fieldCode="AR" term="%22Huang%2C+Adam%22">Huang, Adam</searchLink><i> pohao@seas.ucla.edu</i><br /><searchLink fieldCode="AR" term="%22Wong%2C+Victor+Tak+Sing%22">Wong, Victor Tak Sing</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Ho%2C+Chih-Ming%22">Ho, Chih-Ming</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Sensors+%26+Actuators+B%3A+Chemical%22">Sensors & Actuators B: Chemical</searchLink>. Jul2006, Vol. 116 Issue 1/2, p2-10. 9p.
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  Data: <searchLink fieldCode="DE" term="%22Polymers%22">Polymers</searchLink><br /><searchLink fieldCode="DE" term="%22Silicon%22">Silicon</searchLink><br /><searchLink fieldCode="DE" term="%22Microelectromechanical+systems%22">Microelectromechanical systems</searchLink><br /><searchLink fieldCode="DE" term="%22Detectors%22">Detectors</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Abstract: Soft polymeric materials have proven to provide a host of new capabilities for micro-electro-mechanical systems (MEMS). However, the direct patterning of soft polymeric materials on substrates is not as developed as those found in photolithographic technologies for MEMS. This paper demonstrates the patterning of fully aligned soft polymeric materials, such as the room temperature vulcanizing (RTV) silicone, on glass or silicon substrates using the direct polymer patterning on substrate technique (DPPOST). The patterned polymer line width of ∼10μm has been achieved using this technique. By utilizing this newly developed fabrication technology, single and array elements of silicone–carbon black polymeric chemical vapor sensor has been fabricated and tested for the intended application in electronic nose systems. The sensors have been shown to be sensitive to common solvents such as acetone, methanol, ethanol and 2-propanol. Simple noise measurement experiments also show the insensitivity of the sensor noise to the chemical vapor concentrations. [Copyright &y& Elsevier]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Sensors & Actuators B: Chemical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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      – Type: doi
        Value: 10.1016/j.snb.2005.11.086
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        Text: English
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        Type: general
      – SubjectFull: Silicon
        Type: general
      – SubjectFull: Microelectromechanical systems
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      – SubjectFull: Detectors
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    Titles:
      – TitleFull: Silicone polymer chemical vapor sensors fabricated by direct polymer patterning on substrate technique (DPPOST)
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              Text: Jul2006
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