Proton beam writing of microstructures at the ion nanoprobe LIPSION
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| Title: | Proton beam writing of microstructures at the ion nanoprobe LIPSION |
|---|---|
| Authors: | Menzel, F.1 fmenzel@physik.uni-leipzig.de, Spemann, D.1, Petriconi, S.1, Lenzner, J.2, Butz, T.1 |
| Source: | Nuclear Instruments & Methods in Physics Research Section B. Sep2006, Vol. 250 Issue 1/2, p66-70. 5p. |
| Subjects: | Proton beams, Microstructure, Nanoscience, Particle beams |
| Abstract: | Abstract: Proton beam writing (PBW) is a direct writing technique which allows the creation of three-dimensional structures with a high aspect ratio in the micrometer and nanometer range in photoresist materials without the use of templates. At the high-energy ion nanoprobe LIPSION of the University of Leipzig this technique was established recently. In this article the latest results concerning this topic are presented. PBW was successfully performed with the positive resist polymethyl methacrylate (PMMA) which is now used at LIPSION in addition to the negative resist SU-8. With the new data acquisition system MICRODAS being commissioned, a new scan program was developed and tested which is dedicated to the creation of arbitrarily shaped structures. Squares with dimensions down to 1.2μm were created in SU-8 at LIPSION. Furthermore, Ni grids were produced by electroplating, using templates written in PMMA resist. In addition, first structures for studying the growing behavior of Bragg reflectors and the optical characterisation of ZnO nanowhiskers were produced by PBW. [Copyright &y& Elsevier] |
| Copyright of Nuclear Instruments & Methods in Physics Research Section B is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: egs DbLabel: Engineering Source An: 21738406 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Proton beam writing of microstructures at the ion nanoprobe LIPSION – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Menzel%2C+F%2E%22">Menzel, F.</searchLink><relatesTo>1</relatesTo><i> fmenzel@physik.uni-leipzig.de</i><br /><searchLink fieldCode="AR" term="%22Spemann%2C+D%2E%22">Spemann, D.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Petriconi%2C+S%2E%22">Petriconi, S.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Lenzner%2C+J%2E%22">Lenzner, J.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Butz%2C+T%2E%22">Butz, T.</searchLink><relatesTo>1</relatesTo> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Nuclear+Instruments+%26+Methods+in+Physics+Research+Section+B%22">Nuclear Instruments & Methods in Physics Research Section B</searchLink>. Sep2006, Vol. 250 Issue 1/2, p66-70. 5p. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Proton+beams%22">Proton beams</searchLink><br /><searchLink fieldCode="DE" term="%22Microstructure%22">Microstructure</searchLink><br /><searchLink fieldCode="DE" term="%22Nanoscience%22">Nanoscience</searchLink><br /><searchLink fieldCode="DE" term="%22Particle+beams%22">Particle beams</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: Abstract: Proton beam writing (PBW) is a direct writing technique which allows the creation of three-dimensional structures with a high aspect ratio in the micrometer and nanometer range in photoresist materials without the use of templates. At the high-energy ion nanoprobe LIPSION of the University of Leipzig this technique was established recently. In this article the latest results concerning this topic are presented. PBW was successfully performed with the positive resist polymethyl methacrylate (PMMA) which is now used at LIPSION in addition to the negative resist SU-8. With the new data acquisition system MICRODAS being commissioned, a new scan program was developed and tested which is dedicated to the creation of arbitrarily shaped structures. Squares with dimensions down to 1.2μm were created in SU-8 at LIPSION. Furthermore, Ni grids were produced by electroplating, using templates written in PMMA resist. In addition, first structures for studying the growing behavior of Bragg reflectors and the optical characterisation of ZnO nanowhiskers were produced by PBW. [Copyright &y& Elsevier] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of Nuclear Instruments & Methods in Physics Research Section B is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
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| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1016/j.nimb.2006.04.083 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 5 StartPage: 66 Subjects: – SubjectFull: Proton beams Type: general – SubjectFull: Microstructure Type: general – SubjectFull: Nanoscience Type: general – SubjectFull: Particle beams Type: general Titles: – TitleFull: Proton beam writing of microstructures at the ion nanoprobe LIPSION Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Menzel, F. – PersonEntity: Name: NameFull: Spemann, D. – PersonEntity: Name: NameFull: Petriconi, S. – PersonEntity: Name: NameFull: Lenzner, J. – PersonEntity: Name: NameFull: Butz, T. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 09 Text: Sep2006 Type: published Y: 2006 Identifiers: – Type: issn-print Value: 0168583X Numbering: – Type: volume Value: 250 – Type: issue Value: 1/2 Titles: – TitleFull: Nuclear Instruments & Methods in Physics Research Section B Type: main |
| ResultId | 1 |
