APA (7th ed.) Citation

Nelson-Fitzpatrick, N., Westra, K., Li, P., McColman, S., Wilding, N., & Evoy, S. (2006). Fabrication of nanoelectromechanical resonators using a cryogenic etching technique. Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures, 24(6), 2769. https://doi.org/10.1116/1.2366608

Chicago Style (17th ed.) Citation

Nelson-Fitzpatrick, N., K. Westra, P. Li, S. McColman, N. Wilding, and S. Evoy. "Fabrication of Nanoelectromechanical Resonators Using a Cryogenic Etching Technique." Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures 24, no. 6 (2006): 2769. https://doi.org/10.1116/1.2366608.

MLA (9th ed.) Citation

Nelson-Fitzpatrick, N., et al. "Fabrication of Nanoelectromechanical Resonators Using a Cryogenic Etching Technique." Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures, vol. 24, no. 6, 2006, p. 2769, https://doi.org/10.1116/1.2366608.