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Fabrication of nanoelectromechanical resonators using a cryogenic etching technique.

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Title: Fabrication of nanoelectromechanical resonators using a cryogenic etching technique.
Authors: Nelson-Fitzpatrick, N.1,2, Westra, K.3, Li, P.4, McColman, S.3, Wilding, N.1,2, Evoy, S.1,2 evoy@ece.ualberta.ca
Source: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures. Nov/Dec2006, Vol. 24 Issue 6, p2769-2771. 3p. 1 Black and White Photograph, 1 Diagram, 2 Charts, 1 Graph.
Subjects: Cryoelectronics, Etching, Electric resonators, Machining, Low temperature engineering
Abstract: The article presents a study which explored the application of cryogenic etching for the machining of released high-aspect-ratio nanoelectromechanical systems resonators. The cryogenic nanomechanical etching methodology is described in detail. The preliminary characterization of resonators machined in such a way is reported. The conclusion of the study is stated.
Database: Engineering Source
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  Availability: 0
Header DbId: egs
DbLabel: Engineering Source
An: 23465256
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
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  Data: Fabrication of nanoelectromechanical resonators using a cryogenic etching technique.
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  Data: <searchLink fieldCode="AR" term="%22Nelson-Fitzpatrick%2C+N%2E%22">Nelson-Fitzpatrick, N.</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AR" term="%22Westra%2C+K%2E%22">Westra, K.</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AR" term="%22Li%2C+P%2E%22">Li, P.</searchLink><relatesTo>4</relatesTo><br /><searchLink fieldCode="AR" term="%22McColman%2C+S%2E%22">McColman, S.</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AR" term="%22Wilding%2C+N%2E%22">Wilding, N.</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AR" term="%22Evoy%2C+S%2E%22">Evoy, S.</searchLink><relatesTo>1,2</relatesTo><i> evoy@ece.ualberta.ca</i>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Vacuum+Science+%26+Technology%3A+Part+B-Microelectronics+%26+Nanometer+Structures%22">Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures</searchLink>. Nov/Dec2006, Vol. 24 Issue 6, p2769-2771. 3p. 1 Black and White Photograph, 1 Diagram, 2 Charts, 1 Graph.
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  Data: <searchLink fieldCode="DE" term="%22Cryoelectronics%22">Cryoelectronics</searchLink><br /><searchLink fieldCode="DE" term="%22Etching%22">Etching</searchLink><br /><searchLink fieldCode="DE" term="%22Electric+resonators%22">Electric resonators</searchLink><br /><searchLink fieldCode="DE" term="%22Machining%22">Machining</searchLink><br /><searchLink fieldCode="DE" term="%22Low+temperature+engineering%22">Low temperature engineering</searchLink>
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  Label: Abstract
  Group: Ab
  Data: The article presents a study which explored the application of cryogenic etching for the machining of released high-aspect-ratio nanoelectromechanical systems resonators. The cryogenic nanomechanical etching methodology is described in detail. The preliminary characterization of resonators machined in such a way is reported. The conclusion of the study is stated.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=egs&AN=23465256
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1116/1.2366608
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 3
        StartPage: 2769
    Subjects:
      – SubjectFull: Cryoelectronics
        Type: general
      – SubjectFull: Etching
        Type: general
      – SubjectFull: Electric resonators
        Type: general
      – SubjectFull: Machining
        Type: general
      – SubjectFull: Low temperature engineering
        Type: general
    Titles:
      – TitleFull: Fabrication of nanoelectromechanical resonators using a cryogenic etching technique.
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            NameFull: Nelson-Fitzpatrick, N.
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            NameFull: Westra, K.
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            NameFull: Li, P.
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            NameFull: McColman, S.
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            NameFull: Wilding, N.
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            – D: 01
              M: 11
              Text: Nov/Dec2006
              Type: published
              Y: 2006
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              Value: 10711023
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              Value: 24
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              Value: 6
          Titles:
            – TitleFull: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
              Type: main
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