Proton beam writing of submicrometer structures at LIPSION
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| Title: | Proton beam writing of submicrometer structures at LIPSION |
|---|---|
| Authors: | Menzel, F.1 fmenzel@physik.uni-leipzig.de, Spemann, D.1, Petriconi, S.1, Lenzner, J.2, Butz, T.1 |
| Source: | Nuclear Instruments & Methods in Physics Research Section B. Jul2007, Vol. 260 Issue 1, p419-425. 7p. |
| Subjects: | Plating, Coating processes, Metal coating, Metal finishing |
| Abstract: | Abstract: We report on the current status of proton beam writing (PBW) at LIPSION. At present, minimal feature sizes of 130nm were obtained in SU-8. For this purpose 10μm thick SU-8 was irradiated with 2.25MeV protons under STIM conditions (∼1fA) using a dedicated scan program. These structures have an aspect ratio of 77. However, artefacts from beam spot fluctuations and instabilities due to their large height are noticeable. Furthermore, Ni grids of different sizes and pitches were produced by electroplating. The corresponding templates were written in a negative resist called ma-N 440, which can be removed much more easily compared to SU-8 after the plating step and therefore offers the advantage of a large area Ni grow and a better control of the plating current density. This results in a higher quality concerning the homogeneity of the Ni-layer. In addition, an experimental setup for the electrochemical etching of silicon was constructed and Si structures were created by proton beam writing of Si, reaching minimal lateral dimensions of 1.2μm. [Copyright &y& Elsevier] |
| Copyright of Nuclear Instruments & Methods in Physics Research Section B is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: egs DbLabel: Engineering Source An: 25318826 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Proton beam writing of submicrometer structures at LIPSION – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Menzel%2C+F%2E%22">Menzel, F.</searchLink><relatesTo>1</relatesTo><i> fmenzel@physik.uni-leipzig.de</i><br /><searchLink fieldCode="AR" term="%22Spemann%2C+D%2E%22">Spemann, D.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Petriconi%2C+S%2E%22">Petriconi, S.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Lenzner%2C+J%2E%22">Lenzner, J.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Butz%2C+T%2E%22">Butz, T.</searchLink><relatesTo>1</relatesTo> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Nuclear+Instruments+%26+Methods+in+Physics+Research+Section+B%22">Nuclear Instruments & Methods in Physics Research Section B</searchLink>. Jul2007, Vol. 260 Issue 1, p419-425. 7p. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Plating%22">Plating</searchLink><br /><searchLink fieldCode="DE" term="%22Coating+processes%22">Coating processes</searchLink><br /><searchLink fieldCode="DE" term="%22Metal+coating%22">Metal coating</searchLink><br /><searchLink fieldCode="DE" term="%22Metal+finishing%22">Metal finishing</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: Abstract: We report on the current status of proton beam writing (PBW) at LIPSION. At present, minimal feature sizes of 130nm were obtained in SU-8. For this purpose 10μm thick SU-8 was irradiated with 2.25MeV protons under STIM conditions (∼1fA) using a dedicated scan program. These structures have an aspect ratio of 77. However, artefacts from beam spot fluctuations and instabilities due to their large height are noticeable. Furthermore, Ni grids of different sizes and pitches were produced by electroplating. The corresponding templates were written in a negative resist called ma-N 440, which can be removed much more easily compared to SU-8 after the plating step and therefore offers the advantage of a large area Ni grow and a better control of the plating current density. This results in a higher quality concerning the homogeneity of the Ni-layer. In addition, an experimental setup for the electrochemical etching of silicon was constructed and Si structures were created by proton beam writing of Si, reaching minimal lateral dimensions of 1.2μm. [Copyright &y& Elsevier] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of Nuclear Instruments & Methods in Physics Research Section B is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
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| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1016/j.nimb.2007.02.056 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 7 StartPage: 419 Subjects: – SubjectFull: Plating Type: general – SubjectFull: Coating processes Type: general – SubjectFull: Metal coating Type: general – SubjectFull: Metal finishing Type: general Titles: – TitleFull: Proton beam writing of submicrometer structures at LIPSION Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Menzel, F. – PersonEntity: Name: NameFull: Spemann, D. – PersonEntity: Name: NameFull: Petriconi, S. – PersonEntity: Name: NameFull: Lenzner, J. – PersonEntity: Name: NameFull: Butz, T. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 07 Text: Jul2007 Type: published Y: 2007 Identifiers: – Type: issn-print Value: 0168583X Numbering: – Type: volume Value: 260 – Type: issue Value: 1 Titles: – TitleFull: Nuclear Instruments & Methods in Physics Research Section B Type: main |
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