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Deuterium influence on optical gap of amorphous carbon diamond-like carbon (DLC) thin film

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Title: Deuterium influence on optical gap of amorphous carbon diamond-like carbon (DLC) thin film
Authors: Mathis, N.1, Meunier, C.1 Cathy.meunier@pu-pm.univ-fcomte.fr, Munnik, F.2, Mikhailov, S.2
Source: Thin Solid Films. Feb2008, Vol. 516 Issue 7, p1508-1511. 4p.
Subjects: Nonmetals, Chemical elements, Arsenic, Boron
Abstract: Abstract: This present study aims to determine the hydrogen influence on the electrical gap of diamond-like carbon (DLC) film. DLC thin layers were deposited on silicon wafer by plasma enhanced chemical vapour deposition (PECVD). With this method we obtain a a-C:H film structure. To understand the mechanism of deposition, local structure and hydrogen effect in DLC we replace our methane plasma source by deuterated methane one. In this article, hydrogen rate is obtained by elastic recoil detection analysis (ERDA), electronic and bulk density is performed with X-ray reflectometry (XRR) and the determination of electrical gap is carried out using ultraviolet–visible absorption spectrometry. A specific attention is carried about the self-bias voltage and time variations to get different DLC and DDLC film compositions and also different electrical properties. We found that including deuterium in carbon increases the Tauc energy while keeping the same density. A comparison between these two sorts of film is expected to improve our understanding of the hydrogen role in the DLC films. [Copyright &y& Elsevier]
Copyright of Thin Solid Films is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 28744104
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PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Deuterium influence on optical gap of amorphous carbon diamond-like carbon (DLC) thin film
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  Data: <searchLink fieldCode="AR" term="%22Mathis%2C+N%2E%22">Mathis, N.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Meunier%2C+C%2E%22">Meunier, C.</searchLink><relatesTo>1</relatesTo><i> Cathy.meunier@pu-pm.univ-fcomte.fr</i><br /><searchLink fieldCode="AR" term="%22Munnik%2C+F%2E%22">Munnik, F.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Mikhailov%2C+S%2E%22">Mikhailov, S.</searchLink><relatesTo>2</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Thin+Solid+Films%22">Thin Solid Films</searchLink>. Feb2008, Vol. 516 Issue 7, p1508-1511. 4p.
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  Data: <searchLink fieldCode="DE" term="%22Nonmetals%22">Nonmetals</searchLink><br /><searchLink fieldCode="DE" term="%22Chemical+elements%22">Chemical elements</searchLink><br /><searchLink fieldCode="DE" term="%22Arsenic%22">Arsenic</searchLink><br /><searchLink fieldCode="DE" term="%22Boron%22">Boron</searchLink>
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  Label: Abstract
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  Data: Abstract: This present study aims to determine the hydrogen influence on the electrical gap of diamond-like carbon (DLC) film. DLC thin layers were deposited on silicon wafer by plasma enhanced chemical vapour deposition (PECVD). With this method we obtain a a-C:H film structure. To understand the mechanism of deposition, local structure and hydrogen effect in DLC we replace our methane plasma source by deuterated methane one. In this article, hydrogen rate is obtained by elastic recoil detection analysis (ERDA), electronic and bulk density is performed with X-ray reflectometry (XRR) and the determination of electrical gap is carried out using ultraviolet–visible absorption spectrometry. A specific attention is carried about the self-bias voltage and time variations to get different DLC and DDLC film compositions and also different electrical properties. We found that including deuterium in carbon increases the Tauc energy while keeping the same density. A comparison between these two sorts of film is expected to improve our understanding of the hydrogen role in the DLC films. [Copyright &y& Elsevier]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Thin Solid Films is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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      – Type: doi
        Value: 10.1016/j.tsf.2007.03.067
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      – Code: eng
        Text: English
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        StartPage: 1508
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        Type: general
      – SubjectFull: Chemical elements
        Type: general
      – SubjectFull: Arsenic
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      – SubjectFull: Boron
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      – TitleFull: Deuterium influence on optical gap of amorphous carbon diamond-like carbon (DLC) thin film
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              M: 02
              Text: Feb2008
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              Y: 2008
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