View in EDS

Deuterated Diamond Like Carbon films (DDLC): Mechanical properties in relation with microstructure

Saved in:
Bibliographic Details
Title: Deuterated Diamond Like Carbon films (DDLC): Mechanical properties in relation with microstructure
Authors: Mathis, N.1, Meunier, C.1 cathy.meunier@pu-pm.univ-fcomte.fr, Guibert, G.2, Mikhailov, S.2, Berthout, G.3
Source: Surface & Coatings Technology. Feb2008, Vol. 202 Issue 11, p2349-2353. 5p.
Subjects: Properties of matter, Carbon, Hydrogen, Surface coatings
Abstract: Abstract: The aim of this work is to study the mechanical properties of Deuterated Diamond Like Carbon (DDLC) in comparison with Diamond Like Carbon (DLC), to clarify the influence of hydrogen in amorphous carbon thin film (a-C:H) of DLC type. For this purpose we substitute hydrogen (H) in the film by its isotope deuterium (D) by replacing CH4 by CD4 and their mixture 1:1 in the plasma. To investigate the deuterium role in the film structure, both hydrogenated and deuterated carbon films are deposited onto silicon wafer and glass substrates using a radio frequency PECVD device. All the amorphous carbon thin films are prepared with a negative self-bias voltage in the range of 50 V to 600 V. We obtain thus a wide variation of chemical composition. Single layer is produced with a constant thickness of 200 nm, controlled by X-ray reflectivity. The effects of deposition parameters on mechanical and adhesion properties of the DLC films are investigated using nano-hardness and nano-scratch tests. Chemical compositions are determined by ions and electrons spectroscopies (RBS, ERDA, XPS). We find, among other results, that replacing hydrogen by deuterium in amorphous carbon structure enhanced hardness properties for low self-bias voltage. [Copyright &y& Elsevier]
Copyright of Surface & Coatings Technology is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
FullText Text:
  Availability: 0
Header DbId: egs
DbLabel: Engineering Source
An: 29957514
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Deuterated Diamond Like Carbon films (DDLC): Mechanical properties in relation with microstructure
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Mathis%2C+N%2E%22">Mathis, N.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Meunier%2C+C%2E%22">Meunier, C.</searchLink><relatesTo>1</relatesTo><i> cathy.meunier@pu-pm.univ-fcomte.fr</i><br /><searchLink fieldCode="AR" term="%22Guibert%2C+G%2E%22">Guibert, G.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Mikhailov%2C+S%2E%22">Mikhailov, S.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Berthout%2C+G%2E%22">Berthout, G.</searchLink><relatesTo>3</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Surface+%26+Coatings+Technology%22">Surface & Coatings Technology</searchLink>. Feb2008, Vol. 202 Issue 11, p2349-2353. 5p.
– Name: Subject
  Label: Subjects
  Group: Su
  Data: <searchLink fieldCode="DE" term="%22Properties+of+matter%22">Properties of matter</searchLink><br /><searchLink fieldCode="DE" term="%22Carbon%22">Carbon</searchLink><br /><searchLink fieldCode="DE" term="%22Hydrogen%22">Hydrogen</searchLink><br /><searchLink fieldCode="DE" term="%22Surface+coatings%22">Surface coatings</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Abstract: The aim of this work is to study the mechanical properties of Deuterated Diamond Like Carbon (DDLC) in comparison with Diamond Like Carbon (DLC), to clarify the influence of hydrogen in amorphous carbon thin film (a-C:H) of DLC type. For this purpose we substitute hydrogen (H) in the film by its isotope deuterium (D) by replacing CH4 by CD4 and their mixture 1:1 in the plasma. To investigate the deuterium role in the film structure, both hydrogenated and deuterated carbon films are deposited onto silicon wafer and glass substrates using a radio frequency PECVD device. All the amorphous carbon thin films are prepared with a negative self-bias voltage in the range of 50 V to 600 V. We obtain thus a wide variation of chemical composition. Single layer is produced with a constant thickness of 200 nm, controlled by X-ray reflectivity. The effects of deposition parameters on mechanical and adhesion properties of the DLC films are investigated using nano-hardness and nano-scratch tests. Chemical compositions are determined by ions and electrons spectroscopies (RBS, ERDA, XPS). We find, among other results, that replacing hydrogen by deuterium in amorphous carbon structure enhanced hardness properties for low self-bias voltage. [Copyright &y& Elsevier]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Surface & Coatings Technology is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=egs&AN=29957514
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1016/j.surfcoat.2007.09.034
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 5
        StartPage: 2349
    Subjects:
      – SubjectFull: Properties of matter
        Type: general
      – SubjectFull: Carbon
        Type: general
      – SubjectFull: Hydrogen
        Type: general
      – SubjectFull: Surface coatings
        Type: general
    Titles:
      – TitleFull: Deuterated Diamond Like Carbon films (DDLC): Mechanical properties in relation with microstructure
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Mathis, N.
      – PersonEntity:
          Name:
            NameFull: Meunier, C.
      – PersonEntity:
          Name:
            NameFull: Guibert, G.
      – PersonEntity:
          Name:
            NameFull: Mikhailov, S.
      – PersonEntity:
          Name:
            NameFull: Berthout, G.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 25
              M: 02
              Text: Feb2008
              Type: published
              Y: 2008
          Identifiers:
            – Type: issn-print
              Value: 02578972
          Numbering:
            – Type: volume
              Value: 202
            – Type: issue
              Value: 11
          Titles:
            – TitleFull: Surface & Coatings Technology
              Type: main
ResultId 1