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Sensitivity enhancement of capacitive-type photoresistor-based humidity sensors using deliquescent salt diffusion method

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Title: Sensitivity enhancement of capacitive-type photoresistor-based humidity sensors using deliquescent salt diffusion method
Authors: Lin, Che-Hsin chehsin@mail.nsysu.edu.tw, Chen, Ching-Hsiu1
Source: Sensors & Actuators B: Chemical. Feb2008, Vol. 129 Issue 2, p531-537. 7p.
Subjects: Salt, Moisture, Humidity, Solution (Chemistry)
Abstract: Abstract: This study presents a novel method for enhancing the moisture sensing performance of capacitive-type humidity sensors through the diffusion of a deliquescent salt of magnesium chloride (MgCl2) into a thin polyimide (PI) sensing film. The diffusion process is performed by immersing the photo-patterned PI film in an inorganic salt solution of MgCl2. The results show that the traces of MgCl2 salt in the PI sensing film enhance both the water absorbability and the humidity sensing performance of the proposed sensor. The sensitivity of the humidity sensor is found to be as much as 32.45pF/%RH for a sensing layer of 10μm thick. These performance characteristics correspond to an improvement of 1361-folds compared to the sensing performance of a humidity sensor with a conventional pure PI sensing film of the equivalent thickness. A 72h test shows that the proposed humidity sensors have good stability for long-term measuring. The novel method proposed in this study provides a simple, reliable, and low-cost means of realizing highly sensitive humidity sensors. [Copyright &y& Elsevier]
Copyright of Sensors & Actuators B: Chemical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 29959174
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Label: Title
  Group: Ti
  Data: Sensitivity enhancement of capacitive-type photoresistor-based humidity sensors using deliquescent salt diffusion method
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  Data: <searchLink fieldCode="AR" term="%22Lin%2C+Che-Hsin%22">Lin, Che-Hsin</searchLink><i> chehsin@mail.nsysu.edu.tw</i><br /><searchLink fieldCode="AR" term="%22Chen%2C+Ching-Hsiu%22">Chen, Ching-Hsiu</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Sensors+%26+Actuators+B%3A+Chemical%22">Sensors & Actuators B: Chemical</searchLink>. Feb2008, Vol. 129 Issue 2, p531-537. 7p.
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  Data: <searchLink fieldCode="DE" term="%22Salt%22">Salt</searchLink><br /><searchLink fieldCode="DE" term="%22Moisture%22">Moisture</searchLink><br /><searchLink fieldCode="DE" term="%22Humidity%22">Humidity</searchLink><br /><searchLink fieldCode="DE" term="%22Solution+%28Chemistry%29%22">Solution (Chemistry)</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Abstract: This study presents a novel method for enhancing the moisture sensing performance of capacitive-type humidity sensors through the diffusion of a deliquescent salt of magnesium chloride (MgCl2) into a thin polyimide (PI) sensing film. The diffusion process is performed by immersing the photo-patterned PI film in an inorganic salt solution of MgCl2. The results show that the traces of MgCl2 salt in the PI sensing film enhance both the water absorbability and the humidity sensing performance of the proposed sensor. The sensitivity of the humidity sensor is found to be as much as 32.45pF/%RH for a sensing layer of 10μm thick. These performance characteristics correspond to an improvement of 1361-folds compared to the sensing performance of a humidity sensor with a conventional pure PI sensing film of the equivalent thickness. A 72h test shows that the proposed humidity sensors have good stability for long-term measuring. The novel method proposed in this study provides a simple, reliable, and low-cost means of realizing highly sensitive humidity sensors. [Copyright &y& Elsevier]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Sensors & Actuators B: Chemical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1016/j.snb.2007.08.048
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 7
        StartPage: 531
    Subjects:
      – SubjectFull: Salt
        Type: general
      – SubjectFull: Moisture
        Type: general
      – SubjectFull: Humidity
        Type: general
      – SubjectFull: Solution (Chemistry)
        Type: general
    Titles:
      – TitleFull: Sensitivity enhancement of capacitive-type photoresistor-based humidity sensors using deliquescent salt diffusion method
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            NameFull: Lin, Che-Hsin
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            NameFull: Chen, Ching-Hsiu
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              Text: Feb2008
              Type: published
              Y: 2008
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              Value: 09254005
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              Value: 129
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              Value: 2
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            – TitleFull: Sensors & Actuators B: Chemical
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