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Effect of Slit Patterning Perpendicular to Magnetic Easy Axis in Thin Film Inductors.

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Title: Effect of Slit Patterning Perpendicular to Magnetic Easy Axis in Thin Film Inductors.
Authors: Masai, Taku1,2, Kitamoto, Yoshitaka1
Source: IEEE Transactions on Magnetics. Nov2008 Part 2 of 2, Vol. 44 Issue 11, p3871-3874. 4p. 8 Graphs.
Subjects: Thin films, Patterning therapy, Anisotropy, Properties of matter, Crystallography
Abstract: In the case of spiral inductors using magnetic thin films with uniaxial anisotropy, magnetic flux pass through both easy and hard axes in the films. Frequency characteristics of inductance in the spiral inductors strongly depend on magnetization behaviors in the magnetic easy-axis direction. Slit patterning perpendicular to the magnetic easy axis in the magnetic thin films influences domain-wall displacement in the easy-axis direction, raising its resonant frequency and improving the permeability in the MHz range. The permeability at 1 MHz in the easy-axis direction takes the maximum value when the wire width is 0.5 mm in the slit-patterned CoZrTa films. Furthermore, also in composite spiral-inductor devices using the slit-patterned CoZrTa films and ferrite substrates, the inductance at 1 MHz takes the maximum value at the same wire width. The slit patterning perpendicular to the magnetic easy axis is effective to achieve high inductance in the MHz range for magnetic thin-film spiral inductors. [ABSTRACT FROM AUTHOR]
Copyright of IEEE Transactions on Magnetics is the property of IEEE and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Data: Effect of Slit Patterning Perpendicular to Magnetic Easy Axis in Thin Film Inductors.
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  Data: <searchLink fieldCode="AR" term="%22Masai%2C+Taku%22">Masai, Taku</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AR" term="%22Kitamoto%2C+Yoshitaka%22">Kitamoto, Yoshitaka</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22IEEE+Transactions+on+Magnetics%22">IEEE Transactions on Magnetics</searchLink>. Nov2008 Part 2 of 2, Vol. 44 Issue 11, p3871-3874. 4p. 8 Graphs.
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  Data: <searchLink fieldCode="DE" term="%22Thin+films%22">Thin films</searchLink><br /><searchLink fieldCode="DE" term="%22Patterning+therapy%22">Patterning therapy</searchLink><br /><searchLink fieldCode="DE" term="%22Anisotropy%22">Anisotropy</searchLink><br /><searchLink fieldCode="DE" term="%22Properties+of+matter%22">Properties of matter</searchLink><br /><searchLink fieldCode="DE" term="%22Crystallography%22">Crystallography</searchLink>
– Name: Abstract
  Label: Abstract
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  Data: In the case of spiral inductors using magnetic thin films with uniaxial anisotropy, magnetic flux pass through both easy and hard axes in the films. Frequency characteristics of inductance in the spiral inductors strongly depend on magnetization behaviors in the magnetic easy-axis direction. Slit patterning perpendicular to the magnetic easy axis in the magnetic thin films influences domain-wall displacement in the easy-axis direction, raising its resonant frequency and improving the permeability in the MHz range. The permeability at 1 MHz in the easy-axis direction takes the maximum value when the wire width is 0.5 mm in the slit-patterned CoZrTa films. Furthermore, also in composite spiral-inductor devices using the slit-patterned CoZrTa films and ferrite substrates, the inductance at 1 MHz takes the maximum value at the same wire width. The slit patterning perpendicular to the magnetic easy axis is effective to achieve high inductance in the MHz range for magnetic thin-film spiral inductors. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of IEEE Transactions on Magnetics is the property of IEEE and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1109/TMAG.2008.2002476
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      – Code: eng
        Text: English
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        PageCount: 4
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    Subjects:
      – SubjectFull: Thin films
        Type: general
      – SubjectFull: Patterning therapy
        Type: general
      – SubjectFull: Anisotropy
        Type: general
      – SubjectFull: Properties of matter
        Type: general
      – SubjectFull: Crystallography
        Type: general
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      – TitleFull: Effect of Slit Patterning Perpendicular to Magnetic Easy Axis in Thin Film Inductors.
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              Text: Nov2008 Part 2 of 2
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              Y: 2008
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