Fabrication of pellicle beam splitters for optical bus application.
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| Title: | Fabrication of pellicle beam splitters for optical bus application. |
|---|---|
| Authors: | Yeo, J. S.1 jong-souk.yeo@hp.com, Mathai, S.2, Tan, M.2, King, L.1 |
| Source: | Applied Physics A: Materials Science & Processing. Jun2009, Vol. 95 Issue 4, p1067-1072. 6p. 1 Color Photograph, 5 Diagrams, 1 Graph. |
| Subjects: | Beam splitters, High performance computing research, Optical interconnects, Microelectromechanical systems, Optical polarization |
| Abstract: | The optical bus architecture for on-board applications requires a number of optical splitters with precise split ratios to route part of the input signal. Since hollow metal waveguide provides well collimated beams with very small gap loss, it opens the possibility of inserting discrete optical beam splitters (taps). The optical tap requires low excess loss, polarization insensitivity, temperature stability, minimized walk-off of the propagating beam, and cost effective manufacturing. By benefiting from the mature interference coating technology for polarization insensitivity and temperature stability, we design a pellicle beam splitter based on a static microelec tro-mechanical system (MEMS) and develop processes to fabricate pellicle splitters using wafer level bonding of silicon and glass substrates, with subsequent thinning to 20 µm. With the approaches described in this paper, we have demonstrated optical beam splitters with excess loss of less than 0.17 dB that operate at a data rate of 10 Gb/s showing a clean eye diagram while providing controlled split ratio and polarization insensitivity. We have demonstrated a high yielding MEMS based silicon processing platform which has the potential to provide a cost effective manufacturing solution for optical beam splitters. [ABSTRACT FROM AUTHOR] |
| Copyright of Applied Physics A: Materials Science & Processing is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
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| Header | DbId: egs DbLabel: Engineering Source An: 39564085 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Fabrication of pellicle beam splitters for optical bus application. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Yeo%2C+J%2E+S%2E%22">Yeo, J. S.</searchLink><relatesTo>1</relatesTo><i> jong-souk.yeo@hp.com</i><br /><searchLink fieldCode="AR" term="%22Mathai%2C+S%2E%22">Mathai, S.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Tan%2C+M%2E%22">Tan, M.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22King%2C+L%2E%22">King, L.</searchLink><relatesTo>1</relatesTo> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Applied+Physics+A%3A+Materials+Science+%26+Processing%22">Applied Physics A: Materials Science & Processing</searchLink>. Jun2009, Vol. 95 Issue 4, p1067-1072. 6p. 1 Color Photograph, 5 Diagrams, 1 Graph. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Beam+splitters%22">Beam splitters</searchLink><br /><searchLink fieldCode="DE" term="%22High+performance+computing+research%22">High performance computing research</searchLink><br /><searchLink fieldCode="DE" term="%22Optical+interconnects%22">Optical interconnects</searchLink><br /><searchLink fieldCode="DE" term="%22Microelectromechanical+systems%22">Microelectromechanical systems</searchLink><br /><searchLink fieldCode="DE" term="%22Optical+polarization%22">Optical polarization</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: The optical bus architecture for on-board applications requires a number of optical splitters with precise split ratios to route part of the input signal. Since hollow metal waveguide provides well collimated beams with very small gap loss, it opens the possibility of inserting discrete optical beam splitters (taps). The optical tap requires low excess loss, polarization insensitivity, temperature stability, minimized walk-off of the propagating beam, and cost effective manufacturing. By benefiting from the mature interference coating technology for polarization insensitivity and temperature stability, we design a pellicle beam splitter based on a static microelec tro-mechanical system (MEMS) and develop processes to fabricate pellicle splitters using wafer level bonding of silicon and glass substrates, with subsequent thinning to 20 µm. With the approaches described in this paper, we have demonstrated optical beam splitters with excess loss of less than 0.17 dB that operate at a data rate of 10 Gb/s showing a clean eye diagram while providing controlled split ratio and polarization insensitivity. We have demonstrated a high yielding MEMS based silicon processing platform which has the potential to provide a cost effective manufacturing solution for optical beam splitters. [ABSTRACT FROM AUTHOR] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of Applied Physics A: Materials Science & Processing is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
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| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1007/s00339-009-5150-1 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 6 StartPage: 1067 Subjects: – SubjectFull: Beam splitters Type: general – SubjectFull: High performance computing research Type: general – SubjectFull: Optical interconnects Type: general – SubjectFull: Microelectromechanical systems Type: general – SubjectFull: Optical polarization Type: general Titles: – TitleFull: Fabrication of pellicle beam splitters for optical bus application. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Yeo, J. S. – PersonEntity: Name: NameFull: Mathai, S. – PersonEntity: Name: NameFull: Tan, M. – PersonEntity: Name: NameFull: King, L. IsPartOfRelationships: – BibEntity: Dates: – D: 15 M: 06 Text: Jun2009 Type: published Y: 2009 Identifiers: – Type: issn-print Value: 09478396 Numbering: – Type: volume Value: 95 – Type: issue Value: 4 Titles: – TitleFull: Applied Physics A: Materials Science & Processing Type: main |
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