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GEMGrid: a wafer post-processed GEM-like radiation detector

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Title: GEMGrid: a wafer post-processed GEM-like radiation detector
Authors: Blanco Carballo, V.M.1 v.m.blancocarballo@utwente.nl, Bilevych, Y.2, Chefdeville, M.2, Fransen, M.2, van der Graaf, H.2, Salm, C.1, Schmitz, J.1, Timmermans, J.2
Source: Nuclear Instruments & Methods in Physics Research Section A. Sep2009, Vol. 608 Issue 1, p86-91. 6p.
Subjects: Nuclear counters, Semiconductor wafers, Ionizing radiation, Microfabrication, Band gaps, Iron isotopes, Radioactive decay, Complementary metal oxide semiconductors
Abstract: Abstract: This paper presents a new wafer post-processed micropatterned gaseous radiation detector called GEMGrid. The device consists of a GEM-like structure fabricated with SU-8 photoresist directly on top of a Timepix chip with zero gap distance. The detector characteristics have been studied in several gas mixtures. The device is capable of tracking minimum ionizing particles and exhibits good energy resolution on 55Fe decays. We further show a strongly improved mechanical robustness of these GEM-like structures as compared to a pillar-supported integrated Micromegas. [Copyright &y& Elsevier]
Copyright of Nuclear Instruments & Methods in Physics Research Section A is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 43766043
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Abstract: This paper presents a new wafer post-processed micropatterned gaseous radiation detector called GEMGrid. The device consists of a GEM-like structure fabricated with SU-8 photoresist directly on top of a Timepix chip with zero gap distance. The detector characteristics have been studied in several gas mixtures. The device is capable of tracking minimum ionizing particles and exhibits good energy resolution on 55Fe decays. We further show a strongly improved mechanical robustness of these GEM-like structures as compared to a pillar-supported integrated Micromegas. [Copyright &y& Elsevier]
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  Data: <i>Copyright of Nuclear Instruments & Methods in Physics Research Section A is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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      – Type: doi
        Value: 10.1016/j.nima.2009.06.023
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      – Code: eng
        Text: English
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        PageCount: 6
        StartPage: 86
    Subjects:
      – SubjectFull: Nuclear counters
        Type: general
      – SubjectFull: Semiconductor wafers
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      – SubjectFull: Ionizing radiation
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      – SubjectFull: Microfabrication
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      – SubjectFull: Band gaps
        Type: general
      – SubjectFull: Iron isotopes
        Type: general
      – SubjectFull: Radioactive decay
        Type: general
      – SubjectFull: Complementary metal oxide semiconductors
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      – TitleFull: GEMGrid: a wafer post-processed GEM-like radiation detector
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              M: 09
              Text: Sep2009
              Type: published
              Y: 2009
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              Value: 608
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