APA (7th ed.) Citation

Cohen, U., & Tzanavaras, G. (2001). Jet ECD planting and seed layers for sub-0.10mum Cu interconnects. Solid State Technology, 44(5), 61.

Chicago Style (17th ed.) Citation

Cohen, Uri, and George Tzanavaras. "Jet ECD Planting and Seed Layers for Sub-0.10mum Cu Interconnects." Solid State Technology 44, no. 5 (2001): 61.

MLA (9th ed.) Citation

Cohen, Uri, and George Tzanavaras. "Jet ECD Planting and Seed Layers for Sub-0.10mum Cu Interconnects." Solid State Technology, vol. 44, no. 5, 2001, p. 61.