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Performance characterization of a new temperature-robust gain-bandwidth improved MEMS gyroscope operated in air

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Title: Performance characterization of a new temperature-robust gain-bandwidth improved MEMS gyroscope operated in air
Authors: Trusov, Alexander A. alex.trusov@gmail.com, Schofield, Adam R.1, Shkel, Andrei M.1
Source: Sensors & Actuators A: Physical. Oct2009, Vol. 155 Issue 1, p16-22. 7p.
Subjects: Microelectromechanical systems, Gyroscopes, Rotational motion (Rigid dynamics), Degrees of freedom, Density functionals, Bandwidths, Robust optimization
Abstract: Abstract: This paper reports a new MEMS vibratory rate gyroscope designed with increased robustness to fabrication imperfections and variations in environmental conditions. The proposed architecture utilizes a single degree-of-freedom (DOF) drive-mode and a fully coupled 2-DOF sense-mode. The drive-mode operational frequency and the sense-mode bandwidth can be set independently, relaxing the tradeoff between the gain, die size, and detection capacitance inherent to the previously reported robust gyroscopes with dynamic vibration absorber (DVA) architecture of the 2-DOF sense-mode. Prototypes with 2.5kHz operational frequency were extensively characterized in air and demonstrated sense-mode 3dB bandwidth of 250Hz. The uncompensated temperature coefficients of bias and scale factor were 313(/h)/C and 351ppm C, respectively. Using off-chip detection electronics, the rate sensitivity was 28 V/(/s), ARW – 0.09(/s)/, bias instability – 0.08(/s), and ARRW – 0.03(/s) . Detailed time domain, Allan variance, and probability density function analysis revealed that both ARW and ARRW are of Gaussian type and Coriolis-uncorrelated, showing stable in-operational noise performance of the reported gyroscope. [Copyright &y& Elsevier]
Copyright of Sensors & Actuators A: Physical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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DbLabel: Engineering Source
An: 44697378
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  Data: Performance characterization of a new temperature-robust gain-bandwidth improved MEMS gyroscope operated in air
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  Data: <searchLink fieldCode="AR" term="%22Trusov%2C+Alexander+A%2E%22">Trusov, Alexander A.</searchLink><i> alex.trusov@gmail.com</i><br /><searchLink fieldCode="AR" term="%22Schofield%2C+Adam+R%2E%22">Schofield, Adam R.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Shkel%2C+Andrei+M%2E%22">Shkel, Andrei M.</searchLink><relatesTo>1</relatesTo>
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  Data: Abstract: This paper reports a new MEMS vibratory rate gyroscope designed with increased robustness to fabrication imperfections and variations in environmental conditions. The proposed architecture utilizes a single degree-of-freedom (DOF) drive-mode and a fully coupled 2-DOF sense-mode. The drive-mode operational frequency and the sense-mode bandwidth can be set independently, relaxing the tradeoff between the gain, die size, and detection capacitance inherent to the previously reported robust gyroscopes with dynamic vibration absorber (DVA) architecture of the 2-DOF sense-mode. Prototypes with 2.5kHz operational frequency were extensively characterized in air and demonstrated sense-mode 3dB bandwidth of 250Hz. The uncompensated temperature coefficients of bias and scale factor were 313(/h)/C and 351ppm C, respectively. Using off-chip detection electronics, the rate sensitivity was 28 V/(/s), ARW – 0.09(/s)/, bias instability – 0.08(/s), and ARRW – 0.03(/s) . Detailed time domain, Allan variance, and probability density function analysis revealed that both ARW and ARRW are of Gaussian type and Coriolis-uncorrelated, showing stable in-operational noise performance of the reported gyroscope. [Copyright &y& Elsevier]
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  Data: <i>Copyright of Sensors & Actuators A: Physical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1016/j.sna.2008.11.003
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        Text: English
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      – SubjectFull: Gyroscopes
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      – SubjectFull: Rotational motion (Rigid dynamics)
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      – SubjectFull: Degrees of freedom
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      – SubjectFull: Density functionals
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      – SubjectFull: Bandwidths
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      – SubjectFull: Robust optimization
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      – TitleFull: Performance characterization of a new temperature-robust gain-bandwidth improved MEMS gyroscope operated in air
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            NameFull: Shkel, Andrei M.
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              Text: Oct2009
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