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Preparation of solar selective absorbing coatings by magnetron sputtering from a single stainless steel target

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Title: Preparation of solar selective absorbing coatings by magnetron sputtering from a single stainless steel target
Authors: Juang, Rei-Cheng1 RCJuang@itri.org.tw, Yeh, Yung-Chin1, Chang, Bing-Hung1, Chen, Wen-Chieh1, Chung, Tsair-Wang2
Source: Thin Solid Films. Jul2010, Vol. 518 Issue 19, p5501-5504. 4p.
Subjects: Stainless steel, Magnetron sputtering, Surface coatings, Electric properties of thin films, Absorption, Solar radiation, Nitrides, Ceramic metals
Abstract: Abstract: This paper presents a method to prepare solar selective absorbing coatings by radio frequency magnetron reactive sputtering using a single stainless steel target. Stainless steel/stainless steel nitride (SS/SS-N) ceramic–metal composite (cermet) thin films were produced under varied nitrogen gas flow ratios. The solar selective absorbing films have good solar absorptance of 0.91 and thermal emittance of 0.06 at 82°C. The refractive index (n) and extinction coefficient (k) of the cermet composite layers prepared in nitrogen and argon atmospheres were determined by spectroscopic ellipsometry. The films were also analyzed by different oscillator models. The results showed a significant transformation from metal to cermet as the nitrogen gas flow ratio was increased to 10%. As the nitrogen gas flow ratio was increased to 17.5%, the film became a dielectric layer that could be used as an anti-reflection layer, suitable as the outermost layer of the solar selective absorbing coatings. A theoretical solar absorptance of 0.92 was achieved by selecting an appropriate combination of three solar absorbing layers. The experimental results agreed well with the theoretical calculations. This study proved the possibility of preparing solar selective absorbing coatings with high solar absorptance by using a single stainless steel target. [Copyright &y& Elsevier]
Copyright of Thin Solid Films is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 51810531
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
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  Data: Preparation of solar selective absorbing coatings by magnetron sputtering from a single stainless steel target
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  Data: <searchLink fieldCode="AR" term="%22Juang%2C+Rei-Cheng%22">Juang, Rei-Cheng</searchLink><relatesTo>1</relatesTo><i> RCJuang@itri.org.tw</i><br /><searchLink fieldCode="AR" term="%22Yeh%2C+Yung-Chin%22">Yeh, Yung-Chin</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Chang%2C+Bing-Hung%22">Chang, Bing-Hung</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Chen%2C+Wen-Chieh%22">Chen, Wen-Chieh</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Chung%2C+Tsair-Wang%22">Chung, Tsair-Wang</searchLink><relatesTo>2</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Thin+Solid+Films%22">Thin Solid Films</searchLink>. Jul2010, Vol. 518 Issue 19, p5501-5504. 4p.
– Name: Subject
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  Data: <searchLink fieldCode="DE" term="%22Stainless+steel%22">Stainless steel</searchLink><br /><searchLink fieldCode="DE" term="%22Magnetron+sputtering%22">Magnetron sputtering</searchLink><br /><searchLink fieldCode="DE" term="%22Surface+coatings%22">Surface coatings</searchLink><br /><searchLink fieldCode="DE" term="%22Electric+properties+of+thin+films%22">Electric properties of thin films</searchLink><br /><searchLink fieldCode="DE" term="%22Absorption%22">Absorption</searchLink><br /><searchLink fieldCode="DE" term="%22Solar+radiation%22">Solar radiation</searchLink><br /><searchLink fieldCode="DE" term="%22Nitrides%22">Nitrides</searchLink><br /><searchLink fieldCode="DE" term="%22Ceramic+metals%22">Ceramic metals</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Abstract: This paper presents a method to prepare solar selective absorbing coatings by radio frequency magnetron reactive sputtering using a single stainless steel target. Stainless steel/stainless steel nitride (SS/SS-N) ceramic–metal composite (cermet) thin films were produced under varied nitrogen gas flow ratios. The solar selective absorbing films have good solar absorptance of 0.91 and thermal emittance of 0.06 at 82°C. The refractive index (n) and extinction coefficient (k) of the cermet composite layers prepared in nitrogen and argon atmospheres were determined by spectroscopic ellipsometry. The films were also analyzed by different oscillator models. The results showed a significant transformation from metal to cermet as the nitrogen gas flow ratio was increased to 10%. As the nitrogen gas flow ratio was increased to 17.5%, the film became a dielectric layer that could be used as an anti-reflection layer, suitable as the outermost layer of the solar selective absorbing coatings. A theoretical solar absorptance of 0.92 was achieved by selecting an appropriate combination of three solar absorbing layers. The experimental results agreed well with the theoretical calculations. This study proved the possibility of preparing solar selective absorbing coatings with high solar absorptance by using a single stainless steel target. [Copyright &y& Elsevier]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Thin Solid Films is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1016/j.tsf.2010.04.025
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 4
        StartPage: 5501
    Subjects:
      – SubjectFull: Stainless steel
        Type: general
      – SubjectFull: Magnetron sputtering
        Type: general
      – SubjectFull: Surface coatings
        Type: general
      – SubjectFull: Electric properties of thin films
        Type: general
      – SubjectFull: Absorption
        Type: general
      – SubjectFull: Solar radiation
        Type: general
      – SubjectFull: Nitrides
        Type: general
      – SubjectFull: Ceramic metals
        Type: general
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      – TitleFull: Preparation of solar selective absorbing coatings by magnetron sputtering from a single stainless steel target
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            NameFull: Juang, Rei-Cheng
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            NameFull: Yeh, Yung-Chin
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            NameFull: Chang, Bing-Hung
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            NameFull: Chen, Wen-Chieh
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            NameFull: Chung, Tsair-Wang
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              Text: Jul2010
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              Y: 2010
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              Value: 518
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