Bibliographic Details
| Title: |
The development of a new windowless XEDS detector. |
| Authors: |
Isakozawa, Shigeto1, Kaji, Kazutoshi1, Tamura, Keiji1, Zhang, Xiao Feng2, Sandborg, Alan3, Baba, Norio4 |
| Source: |
Journal of Electron Microscopy. Dec2010, Vol. 59 Issue 6, p469-472. 4p. 1 Black and White Photograph, 3 Diagrams, 1 Chart, 2 Graphs. |
| Subjects: |
X-ray spectroscopy, Electron microscopes, Electronic probes, Signal detection, Hydrocarbons, Vacuum-gages, Analytical chemistry |
| Abstract: |
A new windowless X-ray energy-dispersive spectroscopy (XEDS) detector has been developed for an analytical electron microscope (AEM). Different from the conventional XEDS detectors, the new detector does not contain an ultra-thin window (UTW) and a vacuum gate valve which are the major causes of low X-ray detection sensitivity and vibration problems for AEM imaging, respectively. The performance of the newly designed detector was examined at an AEM column vacuum level of 10−5 Pa. The X-ray detectability was improved considerably; in particular, the sensitivity for detecting nitrogen characteristic X-ray signal was three times higher than that of the conventional UTW detectors. [ABSTRACT FROM AUTHOR] |
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| Database: |
Engineering Source |
