View in EDS

Micromachined gyroscope concept allowing interchangeable operation in both robust and precision modes

Saved in:
Bibliographic Details
Title: Micromachined gyroscope concept allowing interchangeable operation in both robust and precision modes
Authors: Schofield, Adam R. adam@adamschofield.com, Trusov, Alexander A.1, Shkel, Andrei M.1
Source: Sensors & Actuators A: Physical. Jan2011, Vol. 165 Issue 1, p35-42. 8p.
Subjects: Micromachining, Gyroscopes, Robust control, Precision (Information retrieval), Degrees of freedom, Vibration (Mechanics), Microelectromechanical systems
Abstract: Abstract: This paper presents a new gyroscope design concept with a multi-degree of freedom (DOF) sense mode enabling interchangeable operation in robust or precision modes. This is accomplished using a complete 2-DOF coupled system which, unlike previous multi-DOF designs based on dynamic vibration absorbers, allows for the specification of the sense mode resonances and coupling between the masses independent of operational frequency. The robust mode corresponds to operation between the 2-DOF sense mode resonant peaks providing a response gain and bandwidth controlled at the design level by frequency spacing; the precision mode, however, relies on mode-matching the drive to one of the sense mode resonant frequencies where larger response gains are achieved through vacuum operation. The complete 2-DOF sense mode provides the gyroscope with distinct advantages over similar devices based on 1-DOF systems: the robust mode introduces a gain advantage versus conventional mismatched operation, while the precision mode gain-bandwidth is larger for the same pressures. Experimental rate characterization of a silicon-on-insulator prototype in air for both robust and precision modes demonstrated scale factors of 0.282 and 0.690mV/°/s, respectively, while the scale factor improvement due to precision mode operation is projected to increase by 40dB for operation in 1mTorr vacuum. [Copyright &y& Elsevier]
Copyright of Sensors & Actuators A: Physical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
FullText Text:
  Availability: 0
Header DbId: egs
DbLabel: Engineering Source
An: 58096202
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Micromachined gyroscope concept allowing interchangeable operation in both robust and precision modes
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Schofield%2C+Adam+R%2E%22">Schofield, Adam R.</searchLink><i> adam@adamschofield.com</i><br /><searchLink fieldCode="AR" term="%22Trusov%2C+Alexander+A%2E%22">Trusov, Alexander A.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Shkel%2C+Andrei+M%2E%22">Shkel, Andrei M.</searchLink><relatesTo>1</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Sensors+%26+Actuators+A%3A+Physical%22">Sensors & Actuators A: Physical</searchLink>. Jan2011, Vol. 165 Issue 1, p35-42. 8p.
– Name: Subject
  Label: Subjects
  Group: Su
  Data: <searchLink fieldCode="DE" term="%22Micromachining%22">Micromachining</searchLink><br /><searchLink fieldCode="DE" term="%22Gyroscopes%22">Gyroscopes</searchLink><br /><searchLink fieldCode="DE" term="%22Robust+control%22">Robust control</searchLink><br /><searchLink fieldCode="DE" term="%22Precision+%28Information+retrieval%29%22">Precision (Information retrieval)</searchLink><br /><searchLink fieldCode="DE" term="%22Degrees+of+freedom%22">Degrees of freedom</searchLink><br /><searchLink fieldCode="DE" term="%22Vibration+%28Mechanics%29%22">Vibration (Mechanics)</searchLink><br /><searchLink fieldCode="DE" term="%22Microelectromechanical+systems%22">Microelectromechanical systems</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Abstract: This paper presents a new gyroscope design concept with a multi-degree of freedom (DOF) sense mode enabling interchangeable operation in robust or precision modes. This is accomplished using a complete 2-DOF coupled system which, unlike previous multi-DOF designs based on dynamic vibration absorbers, allows for the specification of the sense mode resonances and coupling between the masses independent of operational frequency. The robust mode corresponds to operation between the 2-DOF sense mode resonant peaks providing a response gain and bandwidth controlled at the design level by frequency spacing; the precision mode, however, relies on mode-matching the drive to one of the sense mode resonant frequencies where larger response gains are achieved through vacuum operation. The complete 2-DOF sense mode provides the gyroscope with distinct advantages over similar devices based on 1-DOF systems: the robust mode introduces a gain advantage versus conventional mismatched operation, while the precision mode gain-bandwidth is larger for the same pressures. Experimental rate characterization of a silicon-on-insulator prototype in air for both robust and precision modes demonstrated scale factors of 0.282 and 0.690mV/°/s, respectively, while the scale factor improvement due to precision mode operation is projected to increase by 40dB for operation in 1mTorr vacuum. [Copyright &y& Elsevier]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Sensors & Actuators A: Physical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=egs&AN=58096202
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1016/j.sna.2010.04.015
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 8
        StartPage: 35
    Subjects:
      – SubjectFull: Micromachining
        Type: general
      – SubjectFull: Gyroscopes
        Type: general
      – SubjectFull: Robust control
        Type: general
      – SubjectFull: Precision (Information retrieval)
        Type: general
      – SubjectFull: Degrees of freedom
        Type: general
      – SubjectFull: Vibration (Mechanics)
        Type: general
      – SubjectFull: Microelectromechanical systems
        Type: general
    Titles:
      – TitleFull: Micromachined gyroscope concept allowing interchangeable operation in both robust and precision modes
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Schofield, Adam R.
      – PersonEntity:
          Name:
            NameFull: Trusov, Alexander A.
      – PersonEntity:
          Name:
            NameFull: Shkel, Andrei M.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 01
              Text: Jan2011
              Type: published
              Y: 2011
          Identifiers:
            – Type: issn-print
              Value: 09244247
          Numbering:
            – Type: volume
              Value: 165
            – Type: issue
              Value: 1
          Titles:
            – TitleFull: Sensors & Actuators A: Physical
              Type: main
ResultId 1