Micromachined gyroscope concept allowing interchangeable operation in both robust and precision modes
Saved in:
| Title: | Micromachined gyroscope concept allowing interchangeable operation in both robust and precision modes |
|---|---|
| Authors: | Schofield, Adam R. adam@adamschofield.com, Trusov, Alexander A.1, Shkel, Andrei M.1 |
| Source: | Sensors & Actuators A: Physical. Jan2011, Vol. 165 Issue 1, p35-42. 8p. |
| Subjects: | Micromachining, Gyroscopes, Robust control, Precision (Information retrieval), Degrees of freedom, Vibration (Mechanics), Microelectromechanical systems |
| Abstract: | Abstract: This paper presents a new gyroscope design concept with a multi-degree of freedom (DOF) sense mode enabling interchangeable operation in robust or precision modes. This is accomplished using a complete 2-DOF coupled system which, unlike previous multi-DOF designs based on dynamic vibration absorbers, allows for the specification of the sense mode resonances and coupling between the masses independent of operational frequency. The robust mode corresponds to operation between the 2-DOF sense mode resonant peaks providing a response gain and bandwidth controlled at the design level by frequency spacing; the precision mode, however, relies on mode-matching the drive to one of the sense mode resonant frequencies where larger response gains are achieved through vacuum operation. The complete 2-DOF sense mode provides the gyroscope with distinct advantages over similar devices based on 1-DOF systems: the robust mode introduces a gain advantage versus conventional mismatched operation, while the precision mode gain-bandwidth is larger for the same pressures. Experimental rate characterization of a silicon-on-insulator prototype in air for both robust and precision modes demonstrated scale factors of 0.282 and 0.690mV/°/s, respectively, while the scale factor improvement due to precision mode operation is projected to increase by 40dB for operation in 1mTorr vacuum. [Copyright &y& Elsevier] |
| Copyright of Sensors & Actuators A: Physical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
Be the first to leave a comment!
