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Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering

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Bibliographic Details
Title: Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering
Authors: Trusov, Alexander A. alex.trusov@gmail.com, Schofield, Adam R.1, Shkel, Andrei M.1
Source: Sensors & Actuators A: Physical. Jan2011, Vol. 165 Issue 1, p26-34. 9p.
Subjects: Micromachining, Gyroscopes, Vibration (Mechanics), Microelectromechanical systems, Product quality, Linear control systems, Mechanical engineering
Abstract: Abstract: This paper reports a new dual mass vibratory MEMS z-axis rate gyroscope architecture that prioritizes the sense-mode quality factor and provides improved ordering of the mechanical vibrational modes. The proposed linearly coupled, dynamically balanced anti-phase sense-mode design minimizes substrate energy dissipation to maximize the quality factor. The levered drive-mode mechanism structurally forces the anti-phase drive-mode motion of the symmetrically decoupled tines eliminating the lower frequency spurious mode and providing true mechanical rejection of external shocks and accelerations. SOI prototypes were characterized in a vacuum chamber demonstrating drive-mode quality factor of 67,000 and ultra-high sense-mode quality factor of 125,000. A vacuum packaging technology was introduced and demonstrated a ceramic package-level sealed gyroscope with a quality factor on the order of 100,000. The high quality factor and mode ordering of the new design provide a path toward ultra-high scale factor without compromising the sensitivity to external accelerations. [Copyright &y& Elsevier]
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Database: Engineering Source
Description
Abstract:Abstract: This paper reports a new dual mass vibratory MEMS z-axis rate gyroscope architecture that prioritizes the sense-mode quality factor and provides improved ordering of the mechanical vibrational modes. The proposed linearly coupled, dynamically balanced anti-phase sense-mode design minimizes substrate energy dissipation to maximize the quality factor. The levered drive-mode mechanism structurally forces the anti-phase drive-mode motion of the symmetrically decoupled tines eliminating the lower frequency spurious mode and providing true mechanical rejection of external shocks and accelerations. SOI prototypes were characterized in a vacuum chamber demonstrating drive-mode quality factor of 67,000 and ultra-high sense-mode quality factor of 125,000. A vacuum packaging technology was introduced and demonstrated a ceramic package-level sealed gyroscope with a quality factor on the order of 100,000. The high quality factor and mode ordering of the new design provide a path toward ultra-high scale factor without compromising the sensitivity to external accelerations. [Copyright &y& Elsevier]
ISSN:09244247
DOI:10.1016/j.sna.2010.01.007