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Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering

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Title: Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering
Authors: Trusov, Alexander A. alex.trusov@gmail.com, Schofield, Adam R.1, Shkel, Andrei M.1
Source: Sensors & Actuators A: Physical. Jan2011, Vol. 165 Issue 1, p26-34. 9p.
Subjects: Micromachining, Gyroscopes, Vibration (Mechanics), Microelectromechanical systems, Product quality, Linear control systems, Mechanical engineering
Abstract: Abstract: This paper reports a new dual mass vibratory MEMS z-axis rate gyroscope architecture that prioritizes the sense-mode quality factor and provides improved ordering of the mechanical vibrational modes. The proposed linearly coupled, dynamically balanced anti-phase sense-mode design minimizes substrate energy dissipation to maximize the quality factor. The levered drive-mode mechanism structurally forces the anti-phase drive-mode motion of the symmetrically decoupled tines eliminating the lower frequency spurious mode and providing true mechanical rejection of external shocks and accelerations. SOI prototypes were characterized in a vacuum chamber demonstrating drive-mode quality factor of 67,000 and ultra-high sense-mode quality factor of 125,000. A vacuum packaging technology was introduced and demonstrated a ceramic package-level sealed gyroscope with a quality factor on the order of 100,000. The high quality factor and mode ordering of the new design provide a path toward ultra-high scale factor without compromising the sensitivity to external accelerations. [Copyright &y& Elsevier]
Copyright of Sensors & Actuators A: Physical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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DbLabel: Engineering Source
An: 58096208
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  Data: Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering
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  Data: <searchLink fieldCode="AR" term="%22Trusov%2C+Alexander+A%2E%22">Trusov, Alexander A.</searchLink><i> alex.trusov@gmail.com</i><br /><searchLink fieldCode="AR" term="%22Schofield%2C+Adam+R%2E%22">Schofield, Adam R.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Shkel%2C+Andrei+M%2E%22">Shkel, Andrei M.</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Sensors+%26+Actuators+A%3A+Physical%22">Sensors & Actuators A: Physical</searchLink>. Jan2011, Vol. 165 Issue 1, p26-34. 9p.
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  Data: <searchLink fieldCode="DE" term="%22Micromachining%22">Micromachining</searchLink><br /><searchLink fieldCode="DE" term="%22Gyroscopes%22">Gyroscopes</searchLink><br /><searchLink fieldCode="DE" term="%22Vibration+%28Mechanics%29%22">Vibration (Mechanics)</searchLink><br /><searchLink fieldCode="DE" term="%22Microelectromechanical+systems%22">Microelectromechanical systems</searchLink><br /><searchLink fieldCode="DE" term="%22Product+quality%22">Product quality</searchLink><br /><searchLink fieldCode="DE" term="%22Linear+control+systems%22">Linear control systems</searchLink><br /><searchLink fieldCode="DE" term="%22Mechanical+engineering%22">Mechanical engineering</searchLink>
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  Data: Abstract: This paper reports a new dual mass vibratory MEMS z-axis rate gyroscope architecture that prioritizes the sense-mode quality factor and provides improved ordering of the mechanical vibrational modes. The proposed linearly coupled, dynamically balanced anti-phase sense-mode design minimizes substrate energy dissipation to maximize the quality factor. The levered drive-mode mechanism structurally forces the anti-phase drive-mode motion of the symmetrically decoupled tines eliminating the lower frequency spurious mode and providing true mechanical rejection of external shocks and accelerations. SOI prototypes were characterized in a vacuum chamber demonstrating drive-mode quality factor of 67,000 and ultra-high sense-mode quality factor of 125,000. A vacuum packaging technology was introduced and demonstrated a ceramic package-level sealed gyroscope with a quality factor on the order of 100,000. The high quality factor and mode ordering of the new design provide a path toward ultra-high scale factor without compromising the sensitivity to external accelerations. [Copyright &y& Elsevier]
– Name: AbstractSuppliedCopyright
  Label:
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  Data: <i>Copyright of Sensors & Actuators A: Physical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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      – SubjectFull: Vibration (Mechanics)
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      – SubjectFull: Mechanical engineering
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              Text: Jan2011
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