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Transparency and electrical properties of meshed metal films

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Title: Transparency and electrical properties of meshed metal films
Authors: Hautcoeur, J.1,2, Castel, X.1 xavier.castel@univ-rennes1.fr, Colombel, F.1, Benzerga, R.1, Himdi, M.1, Legeay, G.1, Motta-Cruz, E.2
Source: Thin Solid Films. Mar2011, Vol. 519 Issue 11, p3851-3858. 8p.
Subjects: Electric properties of metallic films, Optical properties of metallic films, Transparency (Optics), Substrates (Materials science), Magnetron sputtering, Excimer lasers, Electric resistance
Abstract: Abstract: Meshed silver/titanium films, deposited on a 1737 Corning glass substrate by radiofrequency (r.f.) magnetron sputtering and etched by wet process, have been studied. Sputtering parameters have been specifically optimized for thick Ag layer deposition (>3μm) and are discussed. An original excimer laser etching process is used for removing the resist for making the prototypes. Simple sheet resistance and optical transparency computings have been used for the theoretical study. A good agreement is obtained with the experimental results. Transparent and conducting samples have been realized with optical transmittances and sheet resistances ranging from 71% to 81% and from 0.023Ω/□ to 1.03Ω/□, respectively. Hence we demonstrate the independence between optical transparency and sheet resistance for this material AgGL (Ag Grid Layer). The relevance of the mesh structure has been highlighted by the achievement of samples with high level of transparencies and ultra-low sheet resistances. [Copyright &y& Elsevier]
Copyright of Thin Solid Films is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 59324998
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Transparency and electrical properties of meshed metal films
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  Data: <searchLink fieldCode="JN" term="%22Thin+Solid+Films%22">Thin Solid Films</searchLink>. Mar2011, Vol. 519 Issue 11, p3851-3858. 8p.
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  Data: <searchLink fieldCode="DE" term="%22Electric+properties+of+metallic+films%22">Electric properties of metallic films</searchLink><br /><searchLink fieldCode="DE" term="%22Optical+properties+of+metallic+films%22">Optical properties of metallic films</searchLink><br /><searchLink fieldCode="DE" term="%22Transparency+%28Optics%29%22">Transparency (Optics)</searchLink><br /><searchLink fieldCode="DE" term="%22Substrates+%28Materials+science%29%22">Substrates (Materials science)</searchLink><br /><searchLink fieldCode="DE" term="%22Magnetron+sputtering%22">Magnetron sputtering</searchLink><br /><searchLink fieldCode="DE" term="%22Excimer+lasers%22">Excimer lasers</searchLink><br /><searchLink fieldCode="DE" term="%22Electric+resistance%22">Electric resistance</searchLink>
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  Data: Abstract: Meshed silver/titanium films, deposited on a 1737 Corning glass substrate by radiofrequency (r.f.) magnetron sputtering and etched by wet process, have been studied. Sputtering parameters have been specifically optimized for thick Ag layer deposition (>3μm) and are discussed. An original excimer laser etching process is used for removing the resist for making the prototypes. Simple sheet resistance and optical transparency computings have been used for the theoretical study. A good agreement is obtained with the experimental results. Transparent and conducting samples have been realized with optical transmittances and sheet resistances ranging from 71% to 81% and from 0.023Ω/□ to 1.03Ω/□, respectively. Hence we demonstrate the independence between optical transparency and sheet resistance for this material AgGL (Ag Grid Layer). The relevance of the mesh structure has been highlighted by the achievement of samples with high level of transparencies and ultra-low sheet resistances. [Copyright &y& Elsevier]
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  Data: <i>Copyright of Thin Solid Films is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1016/j.tsf.2011.01.262
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        Text: English
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      – SubjectFull: Optical properties of metallic films
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      – SubjectFull: Transparency (Optics)
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      – SubjectFull: Substrates (Materials science)
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      – SubjectFull: Excimer lasers
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      – SubjectFull: Electric resistance
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      – TitleFull: Transparency and electrical properties of meshed metal films
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