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Microstructure of sputter-deposited strontium titanate films.

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Title: Microstructure of sputter-deposited strontium titanate films.
Authors: Nakahara, Shohei1,2, Kim, Deok-Yang3, Jin Kim, Jae4, Hwang, James C. M.2
Source: Journal of Electron Microscopy. Apr2011, Vol. 60 Issue 2, p133-142. 10p.
Subjects: Microstructure, Transmission electron microscopy, Materials texture, Titanates, Thin films, Dielectrics, Simulation methods & models, Electron diffraction, Polycrystals
Abstract: The origin of a marked difference in a dielectric constant, κ, observed between two types of strontium titanium oxide (STO) films sputter-deposited on platinum layers was investigated using a transmission electron microscopy method. The first type of STO films having a low κ value initially grew as an amorphous phase, followed by the formation of a randomly oriented polycrystalline phase. The second type with a high κ, on the other hand, not only grew as a crystalline phase throughout the entire film thickness, but also exhibited a strong [111] fiber texture. The observed difference in κ between these two types of STO films can thus be explained in terms of the degree of film crystallinity and texture. [ABSTRACT FROM AUTHOR]
Copyright of Journal of Electron Microscopy is the property of Oxford University Press / USA and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Data: Microstructure of sputter-deposited strontium titanate films.
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Electron+Microscopy%22">Journal of Electron Microscopy</searchLink>. Apr2011, Vol. 60 Issue 2, p133-142. 10p.
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  Data: <searchLink fieldCode="DE" term="%22Microstructure%22">Microstructure</searchLink><br /><searchLink fieldCode="DE" term="%22Transmission+electron+microscopy%22">Transmission electron microscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Materials+texture%22">Materials texture</searchLink><br /><searchLink fieldCode="DE" term="%22Titanates%22">Titanates</searchLink><br /><searchLink fieldCode="DE" term="%22Thin+films%22">Thin films</searchLink><br /><searchLink fieldCode="DE" term="%22Dielectrics%22">Dielectrics</searchLink><br /><searchLink fieldCode="DE" term="%22Simulation+methods+%26+models%22">Simulation methods & models</searchLink><br /><searchLink fieldCode="DE" term="%22Electron+diffraction%22">Electron diffraction</searchLink><br /><searchLink fieldCode="DE" term="%22Polycrystals%22">Polycrystals</searchLink>
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  Label: Abstract
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  Data: The origin of a marked difference in a dielectric constant, κ, observed between two types of strontium titanium oxide (STO) films sputter-deposited on platinum layers was investigated using a transmission electron microscopy method. The first type of STO films having a low κ value initially grew as an amorphous phase, followed by the formation of a randomly oriented polycrystalline phase. The second type with a high κ, on the other hand, not only grew as a crystalline phase throughout the entire film thickness, but also exhibited a strong [111] fiber texture. The observed difference in κ between these two types of STO films can thus be explained in terms of the degree of film crystallinity and texture. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Journal of Electron Microscopy is the property of Oxford University Press / USA and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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      – Type: doi
        Value: 10.1093/jmicro/dfr006
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      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 10
        StartPage: 133
    Subjects:
      – SubjectFull: Microstructure
        Type: general
      – SubjectFull: Transmission electron microscopy
        Type: general
      – SubjectFull: Materials texture
        Type: general
      – SubjectFull: Titanates
        Type: general
      – SubjectFull: Thin films
        Type: general
      – SubjectFull: Dielectrics
        Type: general
      – SubjectFull: Simulation methods & models
        Type: general
      – SubjectFull: Electron diffraction
        Type: general
      – SubjectFull: Polycrystals
        Type: general
    Titles:
      – TitleFull: Microstructure of sputter-deposited strontium titanate films.
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            NameFull: Nakahara, Shohei
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            NameFull: Kim, Deok-Yang
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            NameFull: Jin Kim, Jae
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            NameFull: Hwang, James C. M.
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              M: 04
              Text: Apr2011
              Type: published
              Y: 2011
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            – TitleFull: Journal of Electron Microscopy
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