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Integration of silicon-via electrodes with different recording characteristics on a glass microprobe using a glass reflowing process

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Title: Integration of silicon-via electrodes with different recording characteristics on a glass microprobe using a glass reflowing process
Authors: Lee, Yu-Tao1, Yeh, Shih-Rung2, Chang, Yen-Chung2, Fang, Weileun1,3 fang@pme.nthu.edu.tw
Source: Biosensors & Bioelectronics. Aug2011, Vol. 26 Issue 12, p4739-4746. 8p.
Subjects: Microprobe analysis, Microelectromechanical systems, Silicon, Electrodes, Biosensors, Glass, Neurons
Abstract: Abstract: Electrodes on planar type microelectromechanical system (MEMS) microprobes mainly record neurons on the top-side of probe shaft (called a top-side electrode). However, it is often necessary to record neurons other than those on the top-side of the probe shaft. This study uses the glass reflowing technique to embed silicon-vias in a glass probe to implement a microprobe capable of recording neurons around the shaft. The proposed technology makes it possible to fabricate, distribute, and integrate four types of electrodes on the shaft: top-side, back-side, double-side, and sidewall electrodes. These electrodes have different recording characteristics. The in vitro and in vivo (using crayfish and rat brain) experiments in this study shows that the top-side and back-side electrodes are respectively more sensitive to neurons on the top-side and back-side of the probe shaft. In contrast, signals recorded by double-side electrode and sidewall electrode are equally sensitive to neurons around the probe shaft. This study enables the implementation and integration of these four types of electrodes, meeting the requirements of various neural applications. [Copyright &y& Elsevier]
Copyright of Biosensors & Bioelectronics is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 63187606
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PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Integration of silicon-via electrodes with different recording characteristics on a glass microprobe using a glass reflowing process
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  Data: <searchLink fieldCode="AR" term="%22Lee%2C+Yu-Tao%22">Lee, Yu-Tao</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Yeh%2C+Shih-Rung%22">Yeh, Shih-Rung</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Chang%2C+Yen-Chung%22">Chang, Yen-Chung</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Fang%2C+Weileun%22">Fang, Weileun</searchLink><relatesTo>1,3</relatesTo><i> fang@pme.nthu.edu.tw</i>
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  Data: <searchLink fieldCode="JN" term="%22Biosensors+%26+Bioelectronics%22">Biosensors & Bioelectronics</searchLink>. Aug2011, Vol. 26 Issue 12, p4739-4746. 8p.
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  Data: <searchLink fieldCode="DE" term="%22Microprobe+analysis%22">Microprobe analysis</searchLink><br /><searchLink fieldCode="DE" term="%22Microelectromechanical+systems%22">Microelectromechanical systems</searchLink><br /><searchLink fieldCode="DE" term="%22Silicon%22">Silicon</searchLink><br /><searchLink fieldCode="DE" term="%22Electrodes%22">Electrodes</searchLink><br /><searchLink fieldCode="DE" term="%22Biosensors%22">Biosensors</searchLink><br /><searchLink fieldCode="DE" term="%22Glass%22">Glass</searchLink><br /><searchLink fieldCode="DE" term="%22Neurons%22">Neurons</searchLink>
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  Data: Abstract: Electrodes on planar type microelectromechanical system (MEMS) microprobes mainly record neurons on the top-side of probe shaft (called a top-side electrode). However, it is often necessary to record neurons other than those on the top-side of the probe shaft. This study uses the glass reflowing technique to embed silicon-vias in a glass probe to implement a microprobe capable of recording neurons around the shaft. The proposed technology makes it possible to fabricate, distribute, and integrate four types of electrodes on the shaft: top-side, back-side, double-side, and sidewall electrodes. These electrodes have different recording characteristics. The in vitro and in vivo (using crayfish and rat brain) experiments in this study shows that the top-side and back-side electrodes are respectively more sensitive to neurons on the top-side and back-side of the probe shaft. In contrast, signals recorded by double-side electrode and sidewall electrode are equally sensitive to neurons around the probe shaft. This study enables the implementation and integration of these four types of electrodes, meeting the requirements of various neural applications. [Copyright &y& Elsevier]
– Name: AbstractSuppliedCopyright
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  Group: Ab
  Data: <i>Copyright of Biosensors & Bioelectronics is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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      – Type: doi
        Value: 10.1016/j.bios.2011.05.037
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      – Code: eng
        Text: English
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        Type: general
      – SubjectFull: Microelectromechanical systems
        Type: general
      – SubjectFull: Silicon
        Type: general
      – SubjectFull: Electrodes
        Type: general
      – SubjectFull: Biosensors
        Type: general
      – SubjectFull: Glass
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      – SubjectFull: Neurons
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      – TitleFull: Integration of silicon-via electrodes with different recording characteristics on a glass microprobe using a glass reflowing process
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            NameFull: Lee, Yu-Tao
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            NameFull: Yeh, Shih-Rung
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            NameFull: Chang, Yen-Chung
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            NameFull: Fang, Weileun
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              Text: Aug2011
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              Y: 2011
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