Menzel, F., Spemann, D., Koal, T., & Butz, T. (2011). 3D-structures with arbitrary shapes created in negative resists by grayscale proton beam writing. Nuclear Instruments & Methods in Physics Research Section B, 269(20), 2427. https://doi.org/10.1016/j.nimb.2011.02.060
Chicago Style (17th ed.) CitationMenzel, F., D. Spemann, T. Koal, and T. Butz. "3D-structures with Arbitrary Shapes Created in Negative Resists by Grayscale Proton Beam Writing." Nuclear Instruments & Methods in Physics Research Section B 269, no. 20 (2011): 2427. https://doi.org/10.1016/j.nimb.2011.02.060.
MLA (9th ed.) CitationMenzel, F., et al. "3D-structures with Arbitrary Shapes Created in Negative Resists by Grayscale Proton Beam Writing." Nuclear Instruments & Methods in Physics Research Section B, vol. 269, no. 20, 2011, p. 2427, https://doi.org/10.1016/j.nimb.2011.02.060.